EP 1238413 A1 20020911 - METHOD FOR MAKING JUXTAPOSED ISLANDS BY AUTOMATICALLY CONTROLLED DEPOSITION ON A SUBSTRATE AND RESULTING STRUCTURE
Title (en)
METHOD FOR MAKING JUXTAPOSED ISLANDS BY AUTOMATICALLY CONTROLLED DEPOSITION ON A SUBSTRATE AND RESULTING STRUCTURE
Title (de)
HERSTELLUNG VON NEBENEINANDERLIEGENDEN INSELN DURCH SELBSTORGANISIERENDE ABSCHEIDUNG AUF EINEM SUBSTRAT UND SO ERHALTENE ANORDNUNG
Title (fr)
PROCEDE DE FABRICATION D'ILOTS JUXTAPOSES PAR DEPOT AUTOORGANISE SUR UN SUBSTRAT ET STRUCTURE AINSI OBTENUE
Publication
Application
Priority
- FR 0103026 W 20011001
- FR 0012505 A 20001002
Abstract (en)
[origin: WO0229871A1] The invention concerns a structure consisting of a substrate whereof one surface bears juxtaposed islands, formed by a stack of single layers. The invention is characterised in that the islands are supported on a periodic array of stepped surfaces formed by the intersection of two arrays of steps, each stepped surface having a first dimension corresponding to the width of the step of the other array of steps, each stepped surface supporting at least two islands formed by a different stack of single layers whereof the composition is selected between a first composition and a second composition.
IPC 1-7
IPC 8 full level
H01L 21/20 (2006.01)
CPC (source: EP US)
H01L 21/0243 (2013.01 - EP US); H01L 21/02433 (2013.01 - EP US); H01L 21/02658 (2013.01 - EP US)
Citation (search report)
See references of WO 0229871A1
Designated contracting state (EPC)
AT BE CH DE GB IT LI
DOCDB simple family (publication)
WO 0229871 A1 20020411; EP 1238413 A1 20020911; FR 2814854 A1 20020405; FR 2814854 B1 20030725; JP 2004511100 A 20040408; US 2003064570 A1 20030403; US 7285378 B2 20071023
DOCDB simple family (application)
FR 0103026 W 20011001; EP 01974416 A 20011001; FR 0012505 A 20001002; JP 2002533353 A 20011001; US 16303502 A 20020604