Global Patent Index - EP 1238417 A1

EP 1238417 A1 2002-09-11 - SEMICONDUCTOR PROCESSING SILICA SOOT ABRASIVE SLURRY METHOD FOR INTEGRATED CIRCUIT MICROELECTRONICS

Title (en)

SEMICONDUCTOR PROCESSING SILICA SOOT ABRASIVE SLURRY METHOD FOR INTEGRATED CIRCUIT MICROELECTRONICS

Title (de)

SCHLEIFMITTEL AUF BASIS VON SILIKA FÜR DIE BEARBEITUNG VON HALBLEITERSCHEIBEN

Title (fr)

MICRO-ELECTRONIQUE A CIRCUIT INTEGRES : TECHNIQUE DE TRAITEMENT DE SEMI-CONDUCTEURS AU MOYEN D'UNE SUSPENSION ABRASIVE A BASE DE SUIE DE SILICE

Publication

EP 1238417 A1 (EN)

Application

EP 00982198 A

Priority

  • US 0032077 W
  • US 16712199 P

Abstract (en)

[origin: WO0139260A1] The invention utilizes colloidal silica soot (62) in a semiconductor process for chemical-mechanical planarizing a semiconductor integrated circuit workpiece (24) with a slurry (60). The particulate abrasive agent colloidal solid sphere fused silica soot (62) provides a beneficial CMP slurry/process for semiconductor device manufacturing compared to standard semiconductor CMP slurries with conventional colloidal sol-gel or fumed silica.

IPC 1-7 (main, further and additional classification)

H01L 21/302; H01L 21/461

IPC 8 full level (invention and additional information)

B24B 37/04 (2012.01); B24B 57/02 (2006.01); C09G 1/02 (2006.01); C09K 3/14 (2006.01); H01L 21/304 (2006.01); H01L 21/321 (2006.01)

CPC (invention and additional information)

B24B 37/04 (2013.01); B24B 57/02 (2013.01); C09G 1/02 (2013.01); C09K 3/1463 (2013.01); H01L 21/3212 (2013.01)

Citation (search report)

See references of WO 0139260A1

Designated contracting state (EPC)

AT BE CH CY DE FR GB LI NL

EPO simple patent family

WO 0139260 A1 20010531; AU 1925801 A 20010604; EP 1238417 A1 20020911; JP 2003528447 A 20030924; TW 521337 B 20030221

INPADOC legal status


2007-04-11 [18D] APPLICATION DEEMED TO BE WITHDRAWN

- Effective date: 20060601

2004-05-12 [RBV] DESIGNATED CONTRACTING STATES (CORRECTION)

- Designated State(s): AT BE CH CY DE FR GB LI NL

2003-01-02 [RIN1] INVENTOR CHANGED BEFORE GRANT

- Inventor name: DARCANGELO, CHARLES, M.

2003-01-02 [RIN1] INVENTOR CHANGED BEFORE GRANT

- Inventor name: SABIA, ROBERT

2003-01-02 [RIN1] INVENTOR CHANGED BEFORE GRANT

- Inventor name: SELL, ROBERT, D.

2003-01-02 [RIN1] INVENTOR CHANGED BEFORE GRANT

- Inventor name: STEVENS, HARRIE, J.

2003-01-02 [RIN1] INVENTOR CHANGED BEFORE GRANT

- Inventor name: UKRAINCZYK, LJERKA

2002-09-11 [17P] REQUEST FOR EXAMINATION FILED

- Effective date: 20020624

2002-09-11 [AK] DESIGNATED CONTRACTING STATES:

- Kind Code of Ref Document: A1

- Designated State(s): AT BE CH CY DE DK ES FI FR GB GR IE IT LI LU MC NL PT SE TR

2002-09-11 [AX] REQUEST FOR EXTENSION OF THE EUROPEAN PATENT TO:

- Free text: AL;LT;LV;MK;RO;SI