EP 1238435 A1 20020911 - INTERMEDIATE SUCTION SUPPORT AND USE THEREOF FOR MAKING A THIN-LAYERED STRUCTURE
Title (en)
INTERMEDIATE SUCTION SUPPORT AND USE THEREOF FOR MAKING A THIN-LAYERED STRUCTURE
Title (de)
SAUGZWISCHENTRÄGER UND VERWENDUNG ZUR HERSTELLUNG EINER DÜNNSCHICHTSTRUKTUR
Title (fr)
SUPPORT INTERMEDIAIRE ASPIRANT ET SON UTILISATION POUR REALISER UNE STRUCTURE EN COUCHE MINCE
Publication
Application
Priority
- FR 0003482 W 20001212
- FR 9915667 A 19991213
Abstract (en)
[origin: WO0145178A1] The invention concerns an intermediate suction support, having at least a suction surface (62) designed to receive a first surface of at least a substrate comprising an embrittled layer, a film being thus defined between the first surface of the substrate and the embrittled layer, the suction surface (62) of the intermediate support being the surface of at least a suction element (63) including suction means designed so that, when the embrittled layer is subjected to a treatment causing the film to be separated from the rest of the substrate, the film can be recovered. The invention is useful for making a thin-layered structure.
IPC 1-7
H01L 31/0392; H01L 31/18; H01L 31/042; H01L 21/20; H01L 21/00
IPC 8 full level
H01L 21/683 (2006.01); H01L 21/762 (2006.01); H01L 31/0392 (2006.01); H01L 31/18 (2006.01)
CPC (source: EP US)
H01L 21/6838 (2013.01 - EP US); H01L 21/76254 (2013.01 - EP US); H01L 31/18 (2013.01 - EP US); H01L 31/1892 (2013.01 - EP US); H01L 31/1896 (2013.01 - EP US); Y02E 10/50 (2013.01 - US); Y10T 156/1132 (2015.01 - EP US); Y10T 156/1944 (2015.01 - EP US)
Citation (search report)
See references of WO 0145178A1
Designated contracting state (EPC)
AT BE CH DE GB IT LI
DOCDB simple family (publication)
WO 0145178 A1 20010621; EP 1238435 A1 20020911; FR 2802340 A1 20010615; FR 2802340 B1 20030905; JP 2003517217 A 20030520; US 2003047289 A1 20030313; US 2005270867 A1 20051208; US 7368030 B2 20080506
DOCDB simple family (application)
FR 0003482 W 20001212; EP 00993461 A 20001212; FR 9915667 A 19991213; JP 2001545376 A 20001212; US 14931602 A 20020917; US 19129005 A 20050727