Global Patent Index - EP 1240530 A1

EP 1240530 A1 2002-09-18 - MICROMECHANICAL STRUCTURE, IN PARTICULAR FOR AN ACCELERATION SENSOR

Title (en)

MICROMECHANICAL STRUCTURE, IN PARTICULAR FOR AN ACCELERATION SENSOR

Title (de)

MIKROMECHANISCHE STRUKTUR, INSBESONDERE FÜR EINEN BESCHLEUNIGUNGSSENSOR

Title (fr)

STRUCTURE MICROMECANIQUE, NOTAMMENT POUR UN CAPTEUR D'ACCELERATION

Publication

EP 1240530 A1 (DE)

Application

EP 00988609 A

Priority

  • DE 0004015 W
  • DE 19959707 A

Abstract (en)

[origin: WO0142797A1] The invention relates to a micromechanical structure, in particular for an acceleration sensor, comprising: a substrate (1) which has an anchoring device; and a centrifugal mass (5) which is connected to the anchoring device via a spiral spring device (4a-d), in such a way that the centrifugal mass (5) can be elastically deflected out of its resting position. The centrifugal mass (5) has an elongated convex shape and is substantially rotationally symmetrical in relation to the longitudinal axis (L). Optionally, the centrifugal mass (5) has widened sections (5a, 5b) at both longitudinal ends, onto which the spiral spring device (4a-d) is mounted.

IPC 1-7 (main, further and additional classification)

G01P 15/125

IPC 8 full level (invention and additional information)

B81B 3/00 (2006.01); G01P 15/125 (2006.01); H01L 29/84 (2006.01)

CPC (invention and additional information)

G01P 15/125 (2013.01); G01P 2015/0814 (2013.01)

Citation (search report)

See references of WO 0142797A1

Designated contracting state (EPC)

DE FR GB IT

EPO simple patent family

WO 0142797 A1 20010614; DE 19959707 A1 20010613; DE 50015334 D1 20081009; EP 1240530 A1 20020918; EP 1240530 B1 20080827; JP 2003516544 A 20030513; JP 4750994 B2 20110817; US 6940632 B1 20050906

INPADOC legal status


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2008-10-09 [REF] CORRESPONDS TO:

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2004-05-12 [RBV] DESIGNATED CONTRACTING STATES (CORRECTION)

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2002-10-16 [RIN1] INVENTOR CHANGED BEFORE GRANT

- Inventor name: KIPP, ANDREAS

2002-10-16 [RIN1] INVENTOR CHANGED BEFORE GRANT

- Inventor name: GOETZ, SIEGBERT

2002-10-16 [RIN1] INVENTOR CHANGED BEFORE GRANT

- Inventor name: LUTZ, MARKUS

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