EP 1240530 A1 20020918 - MICROMECHANICAL STRUCTURE, IN PARTICULAR FOR AN ACCELERATION SENSOR
Title (en)
MICROMECHANICAL STRUCTURE, IN PARTICULAR FOR AN ACCELERATION SENSOR
Title (de)
MIKROMECHANISCHE STRUKTUR, INSBESONDERE FÜR EINEN BESCHLEUNIGUNGSSENSOR
Title (fr)
STRUCTURE MICROMECANIQUE, NOTAMMENT POUR UN CAPTEUR D'ACCELERATION
Publication
Application
Priority
- DE 0004015 W 20001111
- DE 19959707 A 19991210
Abstract (en)
[origin: WO0142797A1] The invention relates to a micromechanical structure, in particular for an acceleration sensor, comprising: a substrate (1) which has an anchoring device; and a centrifugal mass (5) which is connected to the anchoring device via a spiral spring device (4a-d), in such a way that the centrifugal mass (5) can be elastically deflected out of its resting position. The centrifugal mass (5) has an elongated convex shape and is substantially rotationally symmetrical in relation to the longitudinal axis (L). Optionally, the centrifugal mass (5) has widened sections (5a, 5b) at both longitudinal ends, onto which the spiral spring device (4a-d) is mounted.
IPC 1-7
IPC 8 full level
B81B 3/00 (2006.01); G01P 15/125 (2006.01); H01L 29/84 (2006.01)
CPC (source: EP US)
G01P 15/125 (2013.01 - EP US); G01P 2015/0814 (2013.01 - EP US)
Citation (search report)
See references of WO 0142797A1
Designated contracting state (EPC)
DE FR GB IT
DOCDB simple family (publication)
WO 0142797 A1 20010614; DE 19959707 A1 20010613; DE 50015334 D1 20081009; EP 1240530 A1 20020918; EP 1240530 B1 20080827; JP 2003516544 A 20030513; JP 4750994 B2 20110817; US 6940632 B1 20050906
DOCDB simple family (application)
DE 0004015 W 20001111; DE 19959707 A 19991210; DE 50015334 T 20001111; EP 00988609 A 20001111; JP 2001544035 A 20001111; US 14955802 A 20021226