Global Patent Index - EP 1240663 A2

EP 1240663 A2 2002-09-18 - SUBSTRATE HOLDER

Title (en)

SUBSTRATE HOLDER

Title (de)

SUBSTRATHALTER

Title (fr)

DISPOSITIF DE FIXATION DE SUBSTRATS

Publication

EP 1240663 A2 (DE)

Application

EP 00990686 A

Priority

  • DE 19962170 A
  • EP 0012429 W

Abstract (en)

[origin: WO0146996A2] The invention relates to a substrate holder (1) for holding substrates (5), especially semiconductor wafers. The inventive holder comprises first and second components (3, 4). The substrate (5) can be received between said components. The invention is characterised in that the first component (3) is provided with a base body (7) and at least one support element (70) which can be moved in relation to said body and is elastically pre-stressed in the direction of the second component (4).

IPC 1-7 (main, further and additional classification)

H01L 21/00

IPC 8 full level (invention and additional information)

C25D 17/06 (2006.01); C25D 17/08 (2006.01); H01L 21/683 (2006.01); H01L 21/687 (2006.01)

CPC (invention and additional information)

H01L 21/68721 (2013.01); H01L 21/68785 (2013.01)

Citation (search report)

See references of WO 0146996A3

Designated contracting state (EPC)

AT BE CH CY DE FR IT LI

EPO simple patent family

WO 0146996 A2 20010628; WO 0146996 A3 20020418; DE 19962170 A1 20010712; EP 1240663 A2 20020918; JP 2003518333 A 20030603; TW 512476 B 20021201; US 2003019744 A1 20030130

INPADOC legal status


2004-05-12 [RBV] DESIGNATED CONTRACTING STATES (CORRECTION)

- Designated State(s): AT BE CH CY DE FR IT LI

2003-11-26 [18W] APPLICATION WITHDRAWN

- Effective date: 20030930

2002-09-18 [17P] REQUEST FOR EXAMINATION FILED

- Effective date: 20020613

2002-09-18 [AK] DESIGNATED CONTRACTING STATES:

- Kind Code of Ref Document: A2

- Designated State(s): AT BE CH CY DE DK ES FI FR GB GR IE IT LI LU MC NL PT SE TR