EP 1240663 A2 20020918 - SUBSTRATE HOLDER
Title (en)
SUBSTRATE HOLDER
Title (de)
SUBSTRATHALTER
Title (fr)
DISPOSITIF DE FIXATION DE SUBSTRATS
Publication
Application
Priority
- DE 19962170 A 19991222
- EP 0012429 W 20001208
Abstract (en)
[origin: WO0146996A2] The invention relates to a substrate holder (1) for holding substrates (5), especially semiconductor wafers. The inventive holder comprises first and second components (3, 4). The substrate (5) can be received between said components. The invention is characterised in that the first component (3) is provided with a base body (7) and at least one support element (70) which can be moved in relation to said body and is elastically pre-stressed in the direction of the second component (4).
IPC 1-7
IPC 8 full level
C25D 17/06 (2006.01); C25D 17/08 (2006.01); H01L 21/683 (2006.01); H01L 21/687 (2006.01)
CPC (source: EP KR US)
H01L 21/68 (2013.01 - KR); H01L 21/68721 (2013.01 - EP US); H01L 21/68785 (2013.01 - EP US)
Citation (search report)
See references of WO 0146996A2
Designated contracting state (EPC)
AT BE CH CY DE FR IT LI
DOCDB simple family (publication)
WO 0146996 A2 20010628; WO 0146996 A3 20020418; DE 19962170 A1 20010712; EP 1240663 A2 20020918; JP 2003518333 A 20030603; KR 20020064956 A 20020810; TW 512476 B 20021201; US 2003019744 A1 20030130
DOCDB simple family (application)
EP 0012429 W 20001208; DE 19962170 A 19991222; EP 00990686 A 20001208; JP 2001547632 A 20001208; KR 20027008096 A 20020621; TW 89127351 A 20001220; US 16905802 A 20020717