EP 1242646 A1 20020925 - LIQUID DELIVERY MOCVD OF SBT
Title (en)
LIQUID DELIVERY MOCVD OF SBT
Title (de)
FLÜSSIGKEITSABGABE MOCVD ODER SBT
Title (fr)
DEPOT CHIMIQUE METALLO-ORGANIQUE EN PHASE VAPEUR DE SBT PAR DISTRIBUTION LIQUIDE
Publication
Application
Priority
- US 0029299 W 20001024
- US 44023599 A 19991115
- US 44169499 A 19991116
Abstract (en)
[origin: WO0136705A1] A composition useful in MOCVD of SBT from SBT precursors, including a solvent. The solvent is (i) tetrahydrofuran, or (ii) a solution of toluene and a Lewis base in which toluene is present at a concentration of from about 75 % to about 98 % by volume, based on the total volume of toluene and the Lewis base. The composition is usefully employed for liquid delivery MOCVD of SBT films.
IPC 1-7
IPC 8 full level
C23C 16/40 (2006.01)
CPC (source: EP)
C23C 16/409 (2013.01)
Citation (search report)
See references of WO 0136705A1
Designated contracting state (EPC)
AT BE CH DE FR IT LI
DOCDB simple family (publication)
WO 0136705 A1 20010525; AU 8031800 A 20010530; EP 1242646 A1 20020925
DOCDB simple family (application)
US 0029299 W 20001024; AU 8031800 A 20001024; EP 00971019 A 20001024