Global Patent Index - EP 1242646 A1

EP 1242646 A1 2002-09-25 - LIQUID DELIVERY MOCVD OF SBT

Title (en)

LIQUID DELIVERY MOCVD OF SBT

Title (de)

FLÜSSIGKEITSABGABE MOCVD ODER SBT

Title (fr)

DEPOT CHIMIQUE METALLO-ORGANIQUE EN PHASE VAPEUR DE SBT PAR DISTRIBUTION LIQUIDE

Publication

EP 1242646 A1 (EN)

Application

EP 00971019 A

Priority

  • US 0029299 W
  • US 44023599 A
  • US 44169499 A

Abstract (en)

[origin: WO0136705A1] A composition useful in MOCVD of SBT from SBT precursors, including a solvent. The solvent is (i) tetrahydrofuran, or (ii) a solution of toluene and a Lewis base in which toluene is present at a concentration of from about 75 % to about 98 % by volume, based on the total volume of toluene and the Lewis base. The composition is usefully employed for liquid delivery MOCVD of SBT films.

IPC 1-7 (main, further and additional classification)

C23C 16/40; C09K 3/00

IPC 8 full level (invention and additional information)

C23C 16/40 (2006.01)

CPC (invention and additional information)

C23C 16/409 (2013.01)

Citation (search report)

See references of WO 0136705A1

Designated contracting state (EPC)

AT BE CH DE FR IT LI

DOCDB simple family

WO 0136705 A1 20010525; AU 8031800 A 20010530; EP 1242646 A1 20020925