Global Patent Index - EP 1242648 A1

EP 1242648 A1 2002-09-25 - COATING METHOD

Title (en)

COATING METHOD

Title (de)

BESCHICHTUNGSVERFAHREN

Title (fr)

PROCEDE DE REVETEMENT

Publication

EP 1242648 A1 (DE)

Application

EP 00989833 A

Priority

  • DE 0004353 W
  • DE 19960092 A

Abstract (en)

[origin: WO0144539A1] The invention relates to a method for coating work pieces in a vacuum chamber during which a workpiece is exposed to a plasma. The resulting reaction or degradation products of the process gas are deposited onto the work piece. The method is characterized in that two poles, of which one is the workpiece (2) itself or an electrode (7) arranged directly behind the workpiece (2) and the other is a counter electrode, are subjected to an alternating voltage in the frequency range of 10 KHz to 100 MHz in order to maintain the plasma between the poles. In addition, a stream of process gas is guided through the opening (3) of the counter electrode and onto the workpiece (2).

IPC 1-7 (main, further and additional classification)

C23C 16/509; C23C 16/455

IPC 8 full level (invention and additional information)

B01J 3/00 (2006.01); B01J 3/02 (2006.01); B01J 19/08 (2006.01); C23C 16/44 (2006.01); C23C 16/455 (2006.01); C23C 16/509 (2006.01)

CPC (invention and additional information)

C23C 16/45563 (2013.01); C23C 16/4412 (2013.01); C23C 16/509 (2013.01)

Citation (search report)

See references of WO 0144539A1

Designated contracting state (EPC)

DE FR GB IT

EPO simple patent family

WO 0144539 A1 20010621; CZ 20021943 A3 20030115; DE 19960092 A1 20010712; EP 1242648 A1 20020925; JP 2003517103 A 20030520; US 2003091742 A1 20030515

INPADOC legal status


2004-08-04 [18D] APPLICATION DEEMED TO BE WITHDRAWN

- Effective date: 20040123

2004-05-19 [RBV] DESIGNATED CONTRACTING STATES (CORRECTION)

- Designated State(s): DE FR GB IT

2003-10-29 [17Q] FIRST EXAMINATION REPORT

- Effective date: 20030912

2002-09-25 [17P] REQUEST FOR EXAMINATION FILED

- Effective date: 20020715

2002-09-25 [AK] DESIGNATED CONTRACTING STATES:

- Kind Code of Ref Document: A1

- Designated State(s): AT BE CH CY DE DK ES FI FR GB GR IE IT LI LU MC NL PT SE TR