EP 1242648 A1 20020925 - COATING METHOD
Title (en)
COATING METHOD
Title (de)
BESCHICHTUNGSVERFAHREN
Title (fr)
PROCEDE DE REVETEMENT
Publication
Application
Priority
- DE 0004353 W 20001207
- DE 19960092 A 19991214
Abstract (en)
[origin: WO0144539A1] The invention relates to a method for coating work pieces in a vacuum chamber during which a workpiece is exposed to a plasma. The resulting reaction or degradation products of the process gas are deposited onto the work piece. The method is characterized in that two poles, of which one is the workpiece (2) itself or an electrode (7) arranged directly behind the workpiece (2) and the other is a counter electrode, are subjected to an alternating voltage in the frequency range of 10 KHz to 100 MHz in order to maintain the plasma between the poles. In addition, a stream of process gas is guided through the opening (3) of the counter electrode and onto the workpiece (2).
IPC 1-7
IPC 8 full level
B01J 3/00 (2006.01); B01J 3/02 (2006.01); B01J 19/08 (2006.01); C23C 16/44 (2006.01); C23C 16/455 (2006.01); C23C 16/509 (2006.01)
CPC (source: EP US)
C23C 16/4412 (2013.01 - EP US); C23C 16/45563 (2013.01 - EP US); C23C 16/509 (2013.01 - EP US)
Citation (search report)
See references of WO 0144539A1
Designated contracting state (EPC)
DE FR GB IT
DOCDB simple family (publication)
WO 0144539 A1 20010621; CZ 20021943 A3 20030115; DE 19960092 A1 20010712; EP 1242648 A1 20020925; JP 2003517103 A 20030520; US 2003091742 A1 20030515
DOCDB simple family (application)
DE 0004353 W 20001207; CZ 20021943 A 20001207; DE 19960092 A 19991214; EP 00989833 A 20001207; JP 2001545616 A 20001207; US 14969102 A 20020918