EP 1244136 A2 20020925 - Material handling system and method for a multi-workpiece plasma treatment system
Title (en)
Material handling system and method for a multi-workpiece plasma treatment system
Title (de)
System zum Behandeln von Material und Verfahren für ein Plasmabehandlungssystem für mehrere Werkstücke
Title (fr)
Système de manipulation de matériaux et méthode pour un système multi-pièces de traitement au plasma
Publication
Application
Priority
- US 27771401 P 20010321
- US 99887501 A 20011031
Abstract (en)
A plasma treatment system in which untreated workpieces are serially received one at a time on an infeed table but stored in parallel on the infeed table. The untreated workpieces are transferred simultaneously, in parallel, into a plasma treatment chamber. Thereafter, treated workpieces are transferred simultaneously, in parallel, out of the plasma treatment chamber onto an outfeed table; and the outfeed table serially discharges the treated workpieces one at a time from the outfeed table.
IPC 1-7
IPC 8 full level
C23C 14/56 (2006.01); C23C 16/54 (2006.01); H01L 21/00 (2006.01); H01L 21/02 (2006.01); H01L 21/205 (2006.01); H01L 21/3065 (2006.01); H01L 21/677 (2006.01); H05H 1/46 (2006.01)
CPC (source: EP US)
H01J 37/32743 (2013.01 - EP US); H01L 21/67069 (2013.01 - EP US); Y10S 414/139 (2013.01 - EP US)
Designated contracting state (EPC)
AT BE CH CY DE DK ES FI FR GB GR IE IT LI LU MC NL PT SE TR
DOCDB simple family (publication)
EP 1244136 A2 20020925; EP 1244136 A3 20060412; JP 2003037149 A 20030207; TW 571334 B 20040111; US 2002134310 A1 20020926; US 6841033 B2 20050111
DOCDB simple family (application)
EP 02006146 A 20020319; JP 2002081357 A 20020322; TW 91105473 A 20020321; US 99887501 A 20011031