EP 1244823 A1 20021002 - DEVICE FOR PRODUCING A GAS MIXTURE
Title (en)
DEVICE FOR PRODUCING A GAS MIXTURE
Title (de)
VORRICHTUNG ZUM HERSTELLEN EINES GASGEMISCHES
Title (fr)
DISPOSITIF PERMETTANT DE PRODUIRE UN MELANGE GAZEUX
Publication
Application
Priority
- DE 19960333 A 19991215
- EP 0012493 W 20001214
Abstract (en)
[origin: WO0144538A1] The invention relates to a device for producing a gas mixture consisting of HMDSO and oxygen, whereby process gas is produced. In order to be able to continuously produce a large volume of process gas using such a device and to be able to withdraw the same at practical processable temperatures, the invention provides that a number of filling packages (2) are stacked in an elongated essentially vertical column (1) that can be cooled. In addition, an inlet tube (3), which is inserted into the column (1) from the exterior, and a gas outlet connection (6), which leads to the exterior, are secured in the upper area of said column (1). Devices (26) are also provided for measuring the temperature, the pressure and the amount of the exiting gas mixture. In addition, a distribution cup (29) which spans the cross-section of the column (1) and which is provided with gas flow-through openings (38) is placed underneath the inner discharge end (4) of the inlet tube (3).
IPC 1-7
IPC 8 full level
C23C 16/448 (2006.01)
CPC (source: EP US)
C23C 16/4481 (2013.01 - EP US)
Citation (search report)
See references of WO 0144538A1
Designated contracting state (EPC)
AT BE CH CY DE DK ES FI FR GB GR IE IT LI LU MC NL PT SE TR
DOCDB simple family (publication)
WO 0144538 A1 20010621; WO 0144538 A9 20011025; AU 3009101 A 20010625; DE 19960333 A1 20010621; DE 19960333 C2 20021219; EP 1244823 A1 20021002; JP 2003517102 A 20030520; TW 458805 B 20011011; US 2003094711 A1 20030522
DOCDB simple family (application)
EP 0012493 W 20001214; AU 3009101 A 20001214; DE 19960333 A 19991215; EP 00990701 A 20001214; JP 2001545615 A 20001214; TW 89126944 A 20001215; US 14992402 A 20020903