EP 1245529 A3 20021218 - Microminiature movable device
Title (en)
Microminiature movable device
Title (de)
Bewegliches Mikrominiaturbauelement
Title (fr)
Dispositif microminiature mobile
Publication
Application
Priority
JP 2001095841 A 20010329
Abstract (en)
[origin: EP1245529A2] On the top of a central protrusion 81 of a stationary electrode substrate 80 there is formed a stationary electrode 84A. A movable electrode plate 12 is supported at both sides thereof to a support frame 10 through flexures 19 and anchor parts 11. The movable electrode plate 12 is held displaceable vertically to the stationary electrode 12. The marginal edge of the protrusion 81 merges into a sloping face, on which an auxiliary electrode 84B is formed. In the case of separating the movable electrode plate 12 from the stationary electrode 84a, a voltage is applied between them. <IMAGE>
IPC 1-7
IPC 8 full level
B81B 3/00 (2006.01); G02B 26/08 (2006.01); B81C 1/00 (2006.01)
CPC (source: EP US)
G02B 26/0841 (2013.01 - EP US)
Citation (search report)
- [XAY] US 5551293 A 19960903 - BOYSEL ROBERT M [US], et al
- [YA] EP 0419853 A2 19910403 - TEXAS INSTRUMENTS INC [US]
- [XA] EP 0725408 A2 19960807 - MURATA MANUFACTURING CO [JP]
- [XA] PATENT ABSTRACTS OF JAPAN vol. 1998, no. 11 30 September 1998 (1998-09-30)
- [A] KATO Y ET AL: "Development of 4*4 MEMS optical switch", 2000 IEEE/LEOS INTERNATIONAL CONFERENCE ON OPTICAL MEMS (CAT. NO.00EX399), 2000 IEEE/LEOS INTERNATIONAL CONFERENCE ON OPTICAL MEMS, KAUAI, HI, USA, 21-24 AUG. 2000, 2000, Piscataway, NJ, USA, IEEE, USA, pages 95 - 96, XP010518554, ISBN: 0-7803-6257-8
Designated contracting state (EPC)
AT BE CH CY DE DK ES FI FR GB GR IE IT LI LU MC NL PT SE TR
DOCDB simple family (publication)
EP 1245529 A2 20021002; EP 1245529 A3 20021218; JP 2002296516 A 20021009; JP 3557525 B2 20040825; US 2002141038 A1 20021003; US 6603591 B2 20030805
DOCDB simple family (application)
EP 02006542 A 20020320; JP 2001095841 A 20010329; US 10223102 A 20020319