EP 1246951 A1 20021009 - METHOD AND APPARATUS FOR COATING A SUBSTRATE IN A VACUUM
Title (en)
METHOD AND APPARATUS FOR COATING A SUBSTRATE IN A VACUUM
Title (de)
VERFAHREN UND VORRICHTUNG ZUM BESCHICHTEN EINES SUBSTRATES IM VAKUUM
Title (fr)
PROCEDE ET APPAREIL DESTINE AU DEPOT SOUS VIDE D'UN REVETEMENT SUR UN SUBSTRAT
Publication
Application
Priority
- US 0029099 W 20001020
- US 16109499 P 19991022
Abstract (en)
[origin: WO0131081A1] A method and apparatus for coating a substrate with a deposition material in a vacuum wherein a material source having a substantially longitudinal deposition emission component is used to create a substantially longitudinal material deposition emission plume which coats a surface of the substrate without increasing the throw distance between the substrate and the material source.
IPC 1-7
IPC 8 full level
C23C 14/12 (2006.01); C23C 14/24 (2006.01)
CPC (source: EP KR)
C23C 14/12 (2013.01 - EP KR); C23C 14/24 (2013.01 - KR); C23C 14/243 (2013.01 - EP); C23C 14/543 (2013.01 - KR)
Designated contracting state (EPC)
AT BE CH CY DE DK ES FI FR GB GR IE IT LI LU MC NL PT SE
DOCDB simple family (publication)
WO 0131081 A1 20010503; AU 1339401 A 20010508; CA 2388178 A1 20010503; CN 1175126 C 20041110; CN 1402800 A 20030312; DE 10085115 T1 20021107; EP 1246951 A1 20021009; EP 1246951 A4 20041013; JP 2003513169 A 20030408; KR 100495751 B1 20050617; KR 20020068039 A 20020824; TW 574396 B 20040201
DOCDB simple family (application)
US 0029099 W 20001020; AU 1339401 A 20001020; CA 2388178 A 20001020; CN 00816326 A 20001020; DE 10085115 T 20001020; EP 00975328 A 20001020; JP 2001533213 A 20001020; KR 20027005091 A 20020419; TW 89122148 A 20001020