EP 1252365 A1 20021030 - METHOD FOR PRODUCING FUNCTIONAL LAYERS WITH A PLASMA JET SOURCE
Title (en)
METHOD FOR PRODUCING FUNCTIONAL LAYERS WITH A PLASMA JET SOURCE
Title (de)
VERFAHREN ZUR ERZEUGUNG VON FUNKTIONSSCHICHTEN MIT EINER PLASMASTRAHLQUELLE
Title (fr)
PROCEDE DE PRODUCTION DE COUCHES FONCTIONNELLES AVEC UNE SOURCE DE JET DE PLASMA
Publication
Application
Priority
- DE 0004207 W 20001125
- DE 19958474 A 19991204
Abstract (en)
[origin: WO0140543A1] The invention relates to a method for producing a coating on a substrate (12) while using at least one plasma jet source (5) that can be operated in a medium high vacuum range up to the pressure range that is near atmospheric pressure. The plasma jet source (5) produces a plasma (10) which exits the plasma jet source (5) in the form of a plasma jet (17) and which acts upon a substrate (12). At least one precursor material (16, 16') is fed to the plasma (10). Said precursor material is broken up or modified in the plasma jet (17) until it reaches the atomic or molecular level and is subsequently deposited on the substrate (12).
IPC 1-7
IPC 8 full level
C23C 16/50 (2006.01); C23C 4/123 (2016.01); C23C 4/134 (2016.01); C23C 16/513 (2006.01)
CPC (source: EP)
C23C 4/123 (2016.01); C23C 4/134 (2016.01); C23C 16/513 (2013.01)
Citation (search report)
See references of WO 0140543A1
Designated contracting state (EPC)
DE FR GB NL
DOCDB simple family (publication)
WO 0140543 A1 20010607; DE 19958474 A1 20010621; EP 1252365 A1 20021030; JP 2003515676 A 20030507
DOCDB simple family (application)
DE 0004207 W 20001125; DE 19958474 A 19991204; EP 00993268 A 20001125; JP 2001542606 A 20001125