EP 1252652 A1 20021030 - METHOD FOR MONITORING A MANUFACTURING PROCESS
Title (en)
METHOD FOR MONITORING A MANUFACTURING PROCESS
Title (de)
VERFAHREN ZUR ÜBERWACHUNG EINES HERSTELLUNGSPROZESSES
Title (fr)
PROCEDE DE SURVEILLANCE D'UN PROCESSUS DE FABRICATION
Publication
Application
Priority
DE 0000249 W 20000125
Abstract (en)
[origin: WO0156072A1] The invention relates to a method for monitoring a manufacturing process, which, by means of a linear combination of measured variables with judiciously chosen weighting, produces a suitable (optimal) signal for the determination of each parameter. The extraction of the parameters from the measured variables is thus greatly simplified and in many cases becomes actually possible for the first time. According to the invention, large amounts of data may now be prepared, such that the crucial information (parameters) can be obtained from the data, almost in real time, or in real time.
IPC 1-7
IPC 8 full level
G01N 21/25 (2006.01); H01L 21/66 (2006.01)
CPC (source: EP US)
G01N 21/25 (2013.01 - EP US); H01L 22/26 (2013.01 - EP US); H01L 22/12 (2013.01 - EP US)
Citation (search report)
See references of WO 0156072A1
Designated contracting state (EPC)
FR IT
DOCDB simple family (publication)
WO 0156072 A1 20010802; EP 1252652 A1 20021030; US 2003008507 A1 20030109; US 7479395 B2 20090120
DOCDB simple family (application)
DE 0000249 W 20000125; EP 00904853 A 20000125; US 20508002 A 20020725