Title (en)

DEVICE FOR ADJUSTING THE DISTRIBUTION OF MICROWAVE ENERGY DENSITY IN AN APPLICATOR AND USE OF THIS DEVICE

Title (de)

VORRICHTUNG ZUR EINSTELLUNG EINER MIKROWELLEN-ENERGIEDICHTEVERTEILUNG IN EINEM APPLIKATOR UND VERWENDUNG DIESER VORRICHTUNG

Title (fr)

DISPOSITIF DE REGULATION D'UNE REPARTITION DE LA DENSITE DE FLUX D'ENERGIE A MICRO-ONDES DANS UN APPLICATEUR, ET UTILISATION DE CE DISPOSITIF

Publication

EP 1252802 B1 20070314 (DE)

Application

EP 01911377 A 20010119

Priority

• DE 0100259 W 20010119
• DE 10005146 A 20000204

Abstract (en)

[origin: US6630653B2] The invention relates to a device for adjusting the distribution of microwave energy density in an applicator which forms a resonator chamber and in which the radiation generated by microwave generators is guided to the applicator wall by waveguides; and to a use for this device. According to the invention, several electroconductive coupling pins (31) are used, each of these extending preferably vertically into both the waveguide chamber and the applicator resonator chamber, in order to feed in the microwaves with as little loss as possible and to enable the field distribution in the resonator chamber to be modified. The invention is especially suitable for producing a plasma.

IPC 8 full level

H05B 6/70 (2006.01); B22F 1/02 (2006.01); B22F 3/10 (2006.01)

CPC (source: EP US)

H05B 6/705 (2013.01 - EP US); H05B 6/707 (2013.01 - EP US); H05B 6/72 (2013.01 - EP US)

Designated contracting state (EPC)

AT BE CH CY DE DK ES FI FR GB GR IE IT LI LU MC NL PT SE TR

DOCDB simple family (publication)

WO 0158215 A1 20010809; AT E357124 T1 20070415; DE 10005146 A1 20010809; DE 50112190 D1 20070426; EP 1252802 A1 20021030; EP 1252802 B1 20070314; JP 2003522392 A 20030722; US 2002190061 A1 20021219; US 6630653 B2 20031007

DOCDB simple family (application)

DE 0100259 W 20010119; AT 01911377 T 20010119; DE 10005146 A 20000204; DE 50112190 T 20010119; EP 01911377 A 20010119; JP 2001557337 A 20010119; US 16878602 A 20020618