Global Patent Index - EP 1255131 A2

EP 1255131 A2 2002-11-06 - Microlens, its forming method and optical module

Title (en)

Microlens, its forming method and optical module

Title (de)

Mikrolinse, ihr Herstellungsverfahren und optisches Modul

Title (fr)

Microlentille, procédé de fabrication et module optique

Publication

EP 1255131 A2 (EN)

Application

EP 02009449 A

Priority

JP 2001129021 A

Abstract (en)

A method for forming many microlenses comparatively easily and effectively is provided. On one end of an optical substrate is formed a plurality of lens planes at regular intervals. Lens areas containing the lens planes are partially covered by an etching mask and etching processing is performed on areas being exposed outside the etching mask to remove the areas to a specified depth. While the lens planes formed on one surface of the optical substrate are being held by a support substrate, polishing processing is performed on another end face of the optical substrate and each microlens formed in the lens areas is separated from the support substrate. <IMAGE>

IPC 1-7 (main, further and additional classification)

G02B 3/00

IPC 8 full level (invention and additional information)

G02B 5/18 (2006.01); G02B 3/00 (2006.01)

CPC (invention and additional information)

G02B 3/0025 (2013.01); G02B 3/0012 (2013.01); G02B 3/0037 (2013.01)

Designated contracting state (EPC)

DE FR GB

EPO simple patent family

EP 1255131 A2 20021106; EP 1255131 A3 20040310; EP 1255131 B1 20070110; DE 60217437 D1 20070222; DE 60217437 T2 20071025; JP 2002323603 A 20021108; JP 3696800 B2 20050921; US 2002158041 A1 20021031; US 2004263987 A1 20041230; US 6790373 B2 20040914; US 6882478 B2 20050419

INPADOC legal status


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