EP 1257496 A2 20021120 - METHOD FOR PRODUCING A MICROMECHANICAL COMPONENT, AND A COMPONENT PRODUCED ACCORDING TO SAID METHOD
Title (en)
METHOD FOR PRODUCING A MICROMECHANICAL COMPONENT, AND A COMPONENT PRODUCED ACCORDING TO SAID METHOD
Title (de)
VERFAHREN ZUR HERSTELLUNG EINES MIKROMECHANISCHEN BAUELEMENTS SOWIE EIN NACH DEM VERFAHREN HERGESTELLTES BAUELEMENT
Title (fr)
PROCEDE DE FABRICATION D'UN COMPOSANT MICROMECANIQUE ET COMPOSANT FABRIQUE SELON CE PROCEDE
Publication
Application
Priority
- DE 0004673 W 20001228
- DE 10006035 A 20000210
Abstract (en)
[origin: WO0158803A2] The invention relates to a method for producing a micromechanical component (100) that comprises at least one cavity (110) and one functional element (12) at least partially disposed in said cavity (110) and/or one functional layer (13a, 13b, 13c) at least partially disposed therein. The invention further relates to a micromechanical component (100) produced according to the inventive method. The aim of the invention is to reduce the production costs for such a micromechanical component. To this end, the functional element (12) and/or the functional layer (13a, 13b, 13c) is provided with a first protective layer (41; 71) at least in a zone that adjoins a first sacrificial coating (52) that temporarily occupies the space of the cavity (22) subsequently formed in one or more etching steps. The material of the first protective layer (41) is selected in such a manner that at least one etching method and/or etching agent etching or dissolving the first sacrificial coating (52) does substantially not corrode the first protective layer (41; 71) or corrodes it only at a reduced etching rate in relation to the first sacrificial coating (52).
IPC 1-7
IPC 8 full level
B81B 3/00 (2006.01); B81C 1/00 (2006.01); B81C 3/00 (2006.01); G01P 15/08 (2006.01); G01P 15/125 (2006.01); H01L 29/84 (2006.01)
CPC (source: EP US)
B81C 1/00801 (2013.01 - EP US); G01P 15/0802 (2013.01 - EP US); G01P 15/125 (2013.01 - EP US); B81B 2203/0136 (2013.01 - EP US); B81B 2203/0315 (2013.01 - EP US); B81C 2201/0109 (2013.01 - EP US); B81C 2201/053 (2013.01 - EP US); G01P 2015/0814 (2013.01 - EP US)
Citation (search report)
See references of WO 0158803A2
Designated contracting state (EPC)
DE FR GB IT
DOCDB simple family (publication)
WO 0158803 A2 20010816; WO 0158803 A3 20020314; DE 10006035 A1 20010816; EP 1257496 A2 20021120; JP 2003531017 A 20031021; JP 4838476 B2 20111214; US 2003141561 A1 20030731; US 6951824 B2 20051004
DOCDB simple family (application)
DE 0004673 W 20001228; DE 10006035 A 20000210; EP 00990587 A 20001228; JP 2001558361 A 20001228; US 20372902 A 20021108