Global Patent Index - EP 1257683 A1

EP 1257683 A1 2002-11-20 - METHOD FOR REMOVING ADSORBED MOLECULES FROM A CHAMBER

Title (en)

METHOD FOR REMOVING ADSORBED MOLECULES FROM A CHAMBER

Title (de)

VERFAHREN ZUM ENTFERNEN VON ADSORBIERTEN MOLEKÜLEN AUS EINER KAMMER

Title (fr)

PROCEDE POUR ELOIGNER D'UNE CHAMBRE DES MOLECULES ADSORBEES

Publication

EP 1257683 A1 (DE)

Application

EP 01905813 A

Priority

  • DE 10008829 A
  • EP 0101931 W

Abstract (en)

[origin: WO0163002A1] In order to quickly and efficiently remove polar molecules, such as water molecules, as well as non-polar molecules, such as oxygen molecules, from a chamber or from objects, second polar molecules having a desorbant effect on the first molecules are introduced into the chamber.

IPC 1-7 (main, further and additional classification)

C23C 14/56; H01L 21/00

IPC 8 full level (invention and additional information)

C23C 16/44 (2006.01); C23C 14/56 (2006.01); H01L 21/00 (2006.01); H01L 21/205 (2006.01); H01L 21/324 (2006.01)

CPC (invention and additional information)

C23C 16/4408 (2013.01); C23C 14/564 (2013.01); H01L 21/67098 (2013.01); Y10S 134/902 (2013.01); Y10S 438/905 (2013.01); Y10S 438/906 (2013.01)

Citation (search report)

See references of WO 0163002A1

Designated contracting state (EPC)

AT BE CH CY DE DK ES FI FR GB GR IE IT LI LU MC NL PT SE TR

EPO simple patent family

WO 0163002 A1 20010830; DE 10008829 A1 20010906; DE 10008829 B4 20050623; EP 1257683 A1 20021120; JP 2003526908 A 20030909; US 2003155000 A1 20030821; US 6830631 B2 20041214

INPADOC legal status


2006-05-24 [18D] DEEMED TO BE WITHDRAWN

- Effective date: 20051020

2002-11-20 [17P] REQUEST FOR EXAMINATION FILED

- Effective date: 20020911

2002-11-20 [AK] DESIGNATED CONTRACTING STATES:

- Kind Code of Ref Document: A1

- Designated State(s): AT BE CH CY DE DK ES FI FR GB GR IE IT LI LU MC NL PT SE TR