EP 1258036 A1 20021120 - METHOD FOR PRODUCING A FERROELECTRIC LAYER
Title (en)
METHOD FOR PRODUCING A FERROELECTRIC LAYER
Title (de)
VERFAHREN ZUR HERSTELLUNG EINER FERROELEKTRISCHEN SCHICHT
Title (fr)
PROCEDE DE PRODUCTION D'UNE COUCHE FERRO-ELECTRIQUE
Publication
Application
Priority
- DE 10008617 A 20000224
- EP 0102035 W 20010222
Abstract (en)
[origin: WO0163658A1] The invention relates to a method for producing a ferroelectric layer. According to the invention, the application of an outer electrical field facilitates the crystallisation of the material in accordance with a predetermined direction. In this way, it is possible to produce ferroelectric layers whose domains are preferably aligned in such a way that their polarisation vectors are positioned perpendicularly to the electrodes of the storage capacitor in a storage cell. As a result, the overall polarisation vector for the domains runs essentially parallel to the field of the storage capacitor while the storage device is in operation and the polarisation produced has a correspondingly high level of remanence. The level of the signal that can be read out of the storage capacitors is also correspondingly high.
IPC 1-7
IPC 8 full level
H01L 21/02 (2006.01); H01L 21/316 (2006.01); H01L 21/8246 (2006.01); H01L 27/115 (2006.01); H01L 27/11502 (2017.01); H01L 27/11507 (2017.01); H01L 21/314 (2006.01)
CPC (source: EP KR US)
H01L 21/02197 (2013.01 - EP KR US); H01L 21/02271 (2013.01 - EP KR US); H01L 21/0234 (2013.01 - US); H01L 21/31691 (2016.02 - US); H01L 28/55 (2013.01 - EP US); H10B 53/00 (2023.02 - EP US); H10B 53/30 (2023.02 - EP US); H10B 99/00 (2023.02 - KR)
Citation (search report)
See references of WO 0163658A1
Designated contracting state (EPC)
AT BE CH DE GB IE LI
DOCDB simple family (publication)
WO 0163658 A1 20010830; DE 10008617 A1 20010906; EP 1258036 A1 20021120; KR 100533698 B1 20051205; KR 20020086568 A 20021118; TW 525196 B 20030321; US 2003138977 A1 20030724; US 6790676 B2 20040914
DOCDB simple family (application)
EP 0102035 W 20010222; DE 10008617 A 20000224; EP 01911688 A 20010222; KR 20027011031 A 20020823; TW 90104171 A 20010223; US 20483002 A 20021205