EP 1258670 A2 20021120 - Gas containment system
Title (en)
Gas containment system
Title (de)
System zum Einschliessen von Gasen
Title (fr)
Système de confinement de gaz
Publication
Application
Priority
GB 0111417 A 20010509
Abstract (en)
A gas containment system comprising a source of high pressure gas and means to regulate the supply of the gas to processing apparatus, wherein in the event of failure of the regulatory means, means are provided to direct gas escaping from the regulatory means in to a chamber at sub-atmospheric pressure. <IMAGE>
IPC 1-7
IPC 8 full level
B01J 4/00 (2006.01); F17C 7/04 (2006.01); F17C 13/12 (2006.01); H01L 21/02 (2006.01)
CPC (source: EP US)
F17C 7/04 (2013.01 - EP US); F17C 13/12 (2013.01 - EP US); F17C 2205/0335 (2013.01 - EP US); F17C 2205/0338 (2013.01 - EP US); F17C 2223/0123 (2013.01 - EP US); F17C 2250/043 (2013.01 - EP US); F17C 2260/036 (2013.01 - EP US); F17C 2260/042 (2013.01 - EP US); F17C 2270/0518 (2013.01 - EP US); Y10T 137/86083 (2015.04 - EP US)
Designated contracting state (EPC)
AT BE CH CY DE DK ES FI FR GB GR IE IT LI LU MC NL PT SE TR
DOCDB simple family (publication)
EP 1258670 A2 20021120; EP 1258670 A3 20050615; GB 0111417 D0 20010704; JP 2003049998 A 20030221; US 2002179156 A1 20021205
DOCDB simple family (application)
EP 02253134 A 20020503; GB 0111417 A 20010509; JP 2002133691 A 20020509; US 13968802 A 20020503