Global Patent Index - EP 1258670 A2

EP 1258670 A2 2002-11-20 - Gas containment system

Title (en)

Gas containment system

Title (de)

System zum Einschliessen von Gasen

Title (fr)

Système de confinement de gaz

Publication

EP 1258670 A2 (EN)

Application

EP 02253134 A

Priority

GB 0111417 A

Abstract (en)

A gas containment system comprising a source of high pressure gas and means to regulate the supply of the gas to processing apparatus, wherein in the event of failure of the regulatory means, means are provided to direct gas escaping from the regulatory means in to a chamber at sub-atmospheric pressure. <IMAGE>

IPC 1-7 (main, further and additional classification)

F17C 7/00; F17C 13/12

IPC 8 full level (invention and additional information)

B01J 4/00 (2006.01); F17C 7/04 (2006.01); F17C 13/12 (2006.01); H01L 21/02 (2006.01)

CPC (invention and additional information)

F17C 13/12 (2013.01); F17C 7/04 (2013.01); F17C 2205/0335 (2013.01); F17C 2205/0338 (2013.01); F17C 2223/0123 (2013.01); F17C 2250/043 (2013.01); F17C 2260/036 (2013.01); F17C 2260/042 (2013.01); F17C 2270/0518 (2013.01); Y10T 137/86083 (2015.04)

Designated contracting state (EPC)

AT BE CH CY DE DK ES FI FR GB GR IE IT LI LU MC NL PT SE TR

EPO simple patent family

EP 1258670 A2 20021120; EP 1258670 A3 20050615; GB 0111417 D0 20010704; JP 2003049998 A 20030221; US 2002179156 A1 20021205

INPADOC legal status


2005-06-29 [18D] APPLICATION DEEMED TO BE WITHDRAWN

- Effective date: 20041201

2005-06-15 [AK] DESIGNATED CONTRACTING STATES:

- Kind Code of Ref Document: A3

- Designated State(s): AT BE CH CY DE DK ES FI FR GB GR IE IT LI LU MC NL PT SE TR

2005-06-15 [AX] REQUEST FOR EXTENSION OF THE EUROPEAN PATENT TO:

- Countries: AL LT LV MK RO SI

2005-06-15 [RIC1] CLASSIFICATION (CORRECTION)

- IPC: 7F 17C 7/00 A

2005-06-15 [RIC1] CLASSIFICATION (CORRECTION)

- IPC: 7F 17C 13/12 B

2002-11-20 [AK] DESIGNATED CONTRACTING STATES:

- Kind Code of Ref Document: A2

- Designated State(s): AT BE CH CY DE DK ES FI FR GB GR IE IT LI LU MC NL PT SE TR

2002-11-20 [AX] REQUEST FOR EXTENSION OF THE EUROPEAN PATENT TO:

- Free text: AL;LT;LV;MK;RO;SI