EP 1259982 A1 20021127 - METHOD OF REDUCING THE SPECIFIC RESISTANCE OF AN ELECTRICALLY CONDUCTING MOLYBDENUM LAYER
Title (en)
METHOD OF REDUCING THE SPECIFIC RESISTANCE OF AN ELECTRICALLY CONDUCTING MOLYBDENUM LAYER
Title (de)
VERFAHREN ZUR HERABSETZUNG DES SPEZIFISCHEN WIDERSTANDES EINER ELEKTRISCH LEITENDEN MOLYBDÄN-SCHICHT
Title (fr)
PROCEDE POUR ABAISSER LA RESISTANCE SPECIFIQUE D'UNE COUCHE ELECTROCONDUCTRICE EN MOLYBDENE
Publication
Application
Priority
- AT 0100401 W 20011221
- AT 9492000 U 20001227
Abstract (en)
[origin: WO02052640A1] The invention relates to a method of reducing the specific resistance of an electrically conducting layer that consists of molybdenum or a molybdenum alloy. The invention is characterized by forming an MoO2 layer on the surface of the electrically conducting layer. The specific layer resistance can thus be reduced by 10 % to 15 %.
IPC 1-7
IPC 8 full level
H01L 21/3205 (2006.01); H01B 13/00 (2006.01); H01L 21/316 (2006.01); H01L 21/768 (2006.01); H01L 23/52 (2006.01)
CPC (source: EP KR US)
C25D 5/48 (2013.01 - KR); H01L 21/02175 (2013.01 - EP KR US); H01L 21/02244 (2013.01 - EP KR US); H01L 21/31683 (2013.01 - US); H01L 21/76888 (2013.01 - EP US)
Designated contracting state (EPC)
AT BE CH CY DE DK FR GB LI LU NL
DOCDB simple family (publication)
WO 02052640 A1 20020704; AT 4290 U1 20010525; EP 1259982 A1 20021127; JP 2004515930 A 20040527; KR 20020090215 A 20021130; US 2003012881 A1 20030116; US 6913790 B2 20050705
DOCDB simple family (application)
AT 0100401 W 20011221; AT 9492000 U 20001227; EP 01271897 A 20011221; JP 2002553240 A 20011221; KR 20027010521 A 20020814; US 22888702 A 20020827