Global Patent Index - EP 1259982 A1

EP 1259982 A1 2002-11-27 - METHOD OF REDUCING THE SPECIFIC RESISTANCE OF AN ELECTRICALLY CONDUCTING MOLYBDENUM LAYER

Title (en)

METHOD OF REDUCING THE SPECIFIC RESISTANCE OF AN ELECTRICALLY CONDUCTING MOLYBDENUM LAYER

Title (de)

VERFAHREN ZUR HERABSETZUNG DES SPEZIFISCHEN WIDERSTANDES EINER ELEKTRISCH LEITENDEN MOLYBDÄN-SCHICHT

Title (fr)

PROCEDE POUR ABAISSER LA RESISTANCE SPECIFIQUE D'UNE COUCHE ELECTROCONDUCTRICE EN MOLYBDENE

Publication

EP 1259982 A1 (DE)

Application

EP 01271897 A

Priority

  • AT 0100401 W
  • AT 9492000 U

Abstract (en)

[origin: WO02052640A1] The invention relates to a method of reducing the specific resistance of an electrically conducting layer that consists of molybdenum or a molybdenum alloy. The invention is characterized by forming an MoO2 layer on the surface of the electrically conducting layer. The specific layer resistance can thus be reduced by 10 % to 15 %.

IPC 1-7 (main, further and additional classification)

H01L 21/768; H01L 21/316

IPC 8 full level (invention and additional information)

H01L 21/3205 (2006.01); H01B 13/00 (2006.01); H01L 21/316 (2006.01); H01L 21/768 (2006.01); H01L 23/52 (2006.01)

CPC (invention and additional information)

H01L 21/76888 (2013.01); H01L 21/31683 (2013.01)

Citation (search report)

See references of WO 02052640A1

Designated contracting state (EPC)

AT BE CH CY DE DK FR GB LI LU NL

EPO simple patent family

WO 02052640 A1 20020704; AT 4290 U1 20010525; EP 1259982 A1 20021127; JP 2004515930 A 20040527; US 2003012881 A1 20030116; US 6913790 B2 20050705

INPADOC legal status


2012-01-25 [18D] APPLICATION DEEMED TO BE WITHDRAWN

- Effective date: 20110701

2006-06-22 [REG DE 8566] DESIGNATED COUNTRY DE NOT LONGER VALID

2006-05-31 [RAP1] TRANSFER OF RIGHTS OF AN APPLICATION

- Owner name: PLANSEE SE

2006-05-17 [RAP1] TRANSFER OF RIGHTS OF AN APPLICATION

- Owner name: PLANSEE SE

2006-01-18 [RAP1] TRANSFER OF RIGHTS OF AN APPLICATION

- Owner name: PLANSEE GMBH

2004-05-26 [RBV] DESIGNATED CONTRACTING STATES (CORRECTION)

- Designated State(s): AT BE CH CY DE DK FR GB LI LU NL

2002-11-27 [17P] REQUEST FOR EXAMINATION FILED

- Effective date: 20020822

2002-11-27 [AK] DESIGNATED CONTRACTING STATES:

- Kind Code of Ref Document: A1

- Designated State(s): AT BE CH CY DE DK ES FI FR GB GR IE IT LI LU MC NL PT SE TR