EP 1261020 A1 20021127 - WAFER MANUFACTURING METHOD, POLISHING APPARATUS, AND WAFER
Title (en)
WAFER MANUFACTURING METHOD, POLISHING APPARATUS, AND WAFER
Title (de)
HALBLEITERSCHEIBENHERSTELLUNGSMETHODE, POLIERMASCHINE UND HALBLEITERSCHEIBE
Title (fr)
PROCEDE DE PRODUCTION DE PLAQUETTES, APPAREIL DE POLISSAGE ET PLAQUETTE
Publication
Application
Priority
- JP 0109240 W 20011022
- JP 2000326470 A 20001026
Abstract (en)
The present invention provides a wafer manufacturing method and a wafer polishing apparatus which enable control of sags in a periphery of a wafer and improvement of nanotopology values thereof that is strongly required recently, and a wafer. In a polishing process for making a mirror surface of the wafer, a back surface of the wafer is polished to produce a reference plane thereof. <IMAGE>
IPC 1-7
IPC 8 full level
H01L 21/302 (2006.01); H01L 21/306 (2006.01)
CPC (source: EP KR US)
B24B 37/345 (2013.01 - EP US); H01L 21/02024 (2013.01 - EP US); H01L 21/304 (2013.01 - KR)
Designated contracting state (EPC)
AT BE CH CY DE FR GB IT LI
DOCDB simple family (publication)
EP 1261020 A1 20021127; EP 1261020 A4 20050119; CN 1217387 C 20050831; CN 1394355 A 20030129; JP 4038429 B2 20080123; JP WO2002035593 A1 20040304; KR 100832942 B1 20080527; KR 100842473 B1 20080701; KR 100882389 B1 20090205; KR 20020053840 A 20020705; KR 20080005309 A 20080110; KR 20080005310 A 20080110; TW 508688 B 20021101; US 2003022495 A1 20030130; US 2009057840 A1 20090305; US 7582221 B2 20090901; WO 0235593 A1 20020502
DOCDB simple family (application)
EP 01976792 A 20011022; CN 01803238 A 20011022; JP 0109240 W 20011022; JP 2002538474 A 20011022; KR 20027005874 A 20020507; KR 20077029682 A 20071220; KR 20077029683 A 20071220; TW 90126311 A 20011024; US 18182902 A 20020723; US 26386708 A 20081103