EP 1266046 A1 20021218 - METHOD AND IMPLEMENTING DEVICE FOR A CHEMICAL REACTION
Title (en)
METHOD AND IMPLEMENTING DEVICE FOR A CHEMICAL REACTION
Title (de)
VERFAHREN UND VORRICHTUNG ZUR HERBEIFÜHRUNG EINER CHEMISCHEN REAKTION
Title (fr)
PROCEDE ET DISPOSITIF DE MISE EN OEUVRE D'UNE REACTION CHIMIQUE
Publication
Application
Priority
- FR 0100746 W 20010313
- FR 0003306 A 20000315
Abstract (en)
[origin: WO0168941A1] The invention concerns a method for performing chemical reactions between gaseous species in accordance with a selective reaction path, by generating an electric discharge (12) in a starting gas between two energizing electrodes (23, 24) whereto is applied an electric supply voltage, so that the discharge brings about energization of at least one of the gaseous species of said starting gas. The invention is characterised in that it consists in providing the following: the starting gas includes at least a carrier gas and at least a reaction gas; the conditions of electric supply of the electrodes are adapted to enable the generation of metastable species among the species of said carrier gas, so that the ratio, in the inter-electrode space, between the concentration in said metastable species and the concentration in electrons is not less than 1.
IPC 1-7
IPC 8 full level
B01J 19/08 (2006.01); C23C 16/40 (2006.01); C23C 16/503 (2006.01); C23C 16/509 (2006.01); H01J 37/32 (2006.01); H01L 21/31 (2006.01)
CPC (source: EP US)
C23C 16/402 (2013.01 - EP US); C23C 16/503 (2013.01 - EP US); H01J 37/32009 (2013.01 - EP US)
Citation (search report)
See references of WO 0168941A1
Designated contracting state (EPC)
AT BE CH CY DE DK ES FI FR GB GR IE IT LI LU MC NL PT SE TR
DOCDB simple family (publication)
FR 2806324 A1 20010921; FR 2806324 B1 20020927; AU 3938901 A 20010924; AU 782275 B2 20050714; CA 2402150 A1 20010920; EP 1266046 A1 20021218; JP 2003527748 A 20030916; US 2003047442 A1 20030313; WO 0168941 A1 20010920
DOCDB simple family (application)
FR 0003306 A 20000315; AU 3938901 A 20010313; CA 2402150 A 20010313; EP 01913997 A 20010313; FR 0100746 W 20010313; JP 2001567816 A 20010313; US 22176202 A 20020913