Global Patent Index - EP 1266053 A1

EP 1266053 A1 2002-12-18 - PROCESS AND DEVICE FOR GROWING SINGLE CRYSTALS, ESPECIALLY OF CaF 2?

Title (en)

PROCESS AND DEVICE FOR GROWING SINGLE CRYSTALS, ESPECIALLY OF CaF 2?

Title (de)

VERFAHREN UND VORRICHTUNG ZUR HERSTELLUNG VON EINKRISTALLEN, INSBESONDERE AUS CAF2

Title (fr)

PROCEDE ET DISPOSITIF PERMETTANT DE PRODUIRE DES MONOCRISTAUX, EN PARTICULIER DE CaF 2?

Publication

EP 1266053 A1 (EN)

Application

EP 01908872 A

Priority

  • FR 0003771 A
  • US 0103759 W

Abstract (en)

[origin: WO0173168A1] The present invention relates to a process and a device for growing single crystals, especially of CaF2. Within the framework of said process, a stack of crucibles (100, 101, ..., 106, ...) containing the starting material is successively moved translationally through a melting chamber (C1) and an annealing chamber (C2), said movement being continuous, smooth and without interruption. The present invention provides for the preparation of fluoride, single crystals, particularly optical fluoride single crystals and optical UV lambda < 248 nm lithography element blanks, most preferably CaF2.

IPC 1-7 (main, further and additional classification)

C30B 11/02; C30B 1/02; C30B 11/14; C30B 29/12

IPC 8 full level (invention and additional information)

C30B 29/12 (2006.01); C30B 11/00 (2006.01)

CPC (invention and additional information)

C30B 11/007 (2013.01); C30B 11/00 (2013.01); C30B 11/001 (2013.01); C30B 29/12 (2013.01)

Citation (search report)

See references of WO 0173168A1

Designated contracting state (EPC)

AT DE

EPO simple patent family

WO 0173168 A1 20011004; EP 1266053 A1 20021218; FR 2806743 A1 20010928; FR 2806743 B1 20020628; JP 2003528795 A 20030930

INPADOC legal status


2007-05-09 [18D] APPLICATION DEEMED TO BE WITHDRAWN

- Effective date: 20060829

2004-05-19 [RBV] DESIGNATED CONTRACTING STATES (CORRECTION)

- Designated State(s): AT DE

2003-03-05 [RIN1] INVENTOR CHANGED BEFORE GRANT

- Inventor name: HERVE, PATRICK, J., P.

2002-12-18 [17P] REQUEST FOR EXAMINATION FILED

- Effective date: 20020912

2002-12-18 [AK] DESIGNATED CONTRACTING STATES:

- Kind Code of Ref Document: A1

- Designated State(s): AT BE CH CY DE DK ES FI FR GB GR IE IT LI LU MC NL PT SE TR

2002-12-18 [AX] REQUEST FOR EXTENSION OF THE EUROPEAN PATENT TO:

- Free text: AL;LT;LV;MK;RO;SI