EP 1266053 A1 20021218 - PROCESS AND DEVICE FOR GROWING SINGLE CRYSTALS, ESPECIALLY OF CaF 2?
Title (en)
PROCESS AND DEVICE FOR GROWING SINGLE CRYSTALS, ESPECIALLY OF CaF 2?
Title (de)
VERFAHREN UND VORRICHTUNG ZUR HERSTELLUNG VON EINKRISTALLEN, INSBESONDERE AUS CAF2
Title (fr)
PROCEDE ET DISPOSITIF PERMETTANT DE PRODUIRE DES MONOCRISTAUX, EN PARTICULIER DE CaF 2?
Publication
Application
Priority
- FR 0003771 A 20000324
- US 0103759 W 20010206
Abstract (en)
[origin: WO0173168A1] The present invention relates to a process and a device for growing single crystals, especially of CaF2. Within the framework of said process, a stack of crucibles (100, 101, ..., 106, ...) containing the starting material is successively moved translationally through a melting chamber (C1) and an annealing chamber (C2), said movement being continuous, smooth and without interruption. The present invention provides for the preparation of fluoride, single crystals, particularly optical fluoride single crystals and optical UV lambda < 248 nm lithography element blanks, most preferably CaF2.
IPC 1-7
IPC 8 full level
C30B 29/12 (2006.01); C30B 11/00 (2006.01)
CPC (source: EP)
C30B 11/00 (2013.01); C30B 11/001 (2013.01); C30B 11/007 (2013.01); C30B 29/12 (2013.01)
Citation (search report)
See references of WO 0173168A1
Designated contracting state (EPC)
AT DE
DOCDB simple family (publication)
WO 0173168 A1 20011004; EP 1266053 A1 20021218; FR 2806743 A1 20010928; FR 2806743 B1 20020628; JP 2003528795 A 20030930
DOCDB simple family (application)
US 0103759 W 20010206; EP 01908872 A 20010206; FR 0003771 A 20000324; JP 2001570876 A 20010206