EP 1266053 A1 2002-12-18 - PROCESS AND DEVICE FOR GROWING SINGLE CRYSTALS, ESPECIALLY OF CaF 2?
PROCESS AND DEVICE FOR GROWING SINGLE CRYSTALS, ESPECIALLY OF CaF 2?
VERFAHREN UND VORRICHTUNG ZUR HERSTELLUNG VON EINKRISTALLEN, INSBESONDERE AUS CAF2
PROCEDE ET DISPOSITIF PERMETTANT DE PRODUIRE DES MONOCRISTAUX, EN PARTICULIER DE CaF 2?
- FR 0003771 A
- US 0103759 W
[origin: WO0173168A1] The present invention relates to a process and a device for growing single crystals, especially of CaF2. Within the framework of said process, a stack of crucibles (100, 101, ..., 106, ...) containing the starting material is successively moved translationally through a melting chamber (C1) and an annealing chamber (C2), said movement being continuous, smooth and without interruption. The present invention provides for the preparation of fluoride, single crystals, particularly optical fluoride single crystals and optical UV lambda < 248 nm lithography element blanks, most preferably CaF2.
IPC 1-7 (main, further and additional classification)
IPC 8 full level (invention and additional information)
CPC (invention and additional information)
Citation (search report)
See references of WO 0173168A1
Designated contracting state (EPC)
EPO simple patent family
INPADOC legal status
2007-05-09 [18D] APPLICATION DEEMED TO BE WITHDRAWN
- Effective date: 20060829
2004-05-19 [RBV] DESIGNATED CONTRACTING STATES (CORRECTION)
- Designated State(s): AT DE
2003-03-05 [RIN1] INVENTOR CHANGED BEFORE GRANT
- Inventor name: HERVE, PATRICK, J., P.
2002-12-18 [17P] REQUEST FOR EXAMINATION FILED
- Effective date: 20020912
2002-12-18 [AK] DESIGNATED CONTRACTING STATES:
- Kind Code of Ref Document: A1
- Designated State(s): AT BE CH CY DE DK ES FI FR GB GR IE IT LI LU MC NL PT SE TR
2002-12-18 [AX] REQUEST FOR EXTENSION OF THE EUROPEAN PATENT TO:
- Free text: AL;LT;LV;MK;RO;SI