EP 1266229 A1 20021218 - MICROMECHANICAL COMPONENT
Title (en)
MICROMECHANICAL COMPONENT
Title (de)
MIKROMECHANISCHES BAUELEMENT
Title (fr)
COMPOSANT MICROMECANIQUE
Publication
Application
Priority
- DE 0100770 W 20010301
- DE 10012960 A 20000316
Abstract (en)
[origin: DE10012960A1] The component consists of a body (mass) secured to a substrate by a flexible mechanical structure. Provision is made to enable the spring constant of this structure to be adjusted in steps.
IPC 1-7
IPC 8 full level
B81B 3/00 (2006.01); G01P 15/08 (2006.01); G01P 15/125 (2006.01)
CPC (source: EP US)
G01P 15/08 (2013.01 - EP US); G01P 15/125 (2013.01 - EP US); G01P 2015/0814 (2013.01 - EP US); H01L 2924/0002 (2013.01 - EP US)
C-Set (source: EP US)
Designated contracting state (EPC)
DE FR GB IT
DOCDB simple family (publication)
DE 10012960 A1 20010920; EP 1266229 A1 20021218; JP 2003527247 A 20030916; US 2003101818 A1 20030605; US 6782749 B2 20040831; WO 0169267 A1 20010920
DOCDB simple family (application)
DE 10012960 A 20000316; DE 0100770 W 20010301; EP 01915072 A 20010301; JP 2001568095 A 20010301; US 23932702 A 20021227