EP 1266249 A1 20021218 - DEEP UV LASER INTERNALLY INDUCED DENSIFICATION IN SILICA GLASSES
Title (en)
DEEP UV LASER INTERNALLY INDUCED DENSIFICATION IN SILICA GLASSES
Title (de)
INTERN BEWIRKTE VERDICHTUNG IN SILIKA-GLASARTEN MIT LASER IM TIEFEN UV-BEREICH
Title (fr)
DENSIFICATION PROFONDE INDUITE DE MANIERE INTERNE PAR UN LASER UV DANS DES VERRES DE SILICE
Publication
Application
Priority
- US 0026939 W 20000929
- US 15673799 P 19990930
Abstract (en)
[origin: WO0123923A1] A method of writing a light guiding structure (26) in a bulk glass substrate (4) including selecting a bulk glass substrate (4) made from a soft silica based material. An excimer laser beam (5) is focused at a focus point (3) within the substrate while translating the focus relative to the substrate along the scan path. The laser beam (5) is moved at a scan speed so as to induce an increase in the refractive index of the material along the scan path relative to that of the unexposed material, while at the same time incurring very little laser induced breakdown of the material along the scan path. Various optical devices, including waveguides, can be made in this way.
IPC 1-7
IPC 8 full level
G02B 6/122 (2006.01); G02B 6/13 (2006.01); G02B 6/12 (2006.01)
CPC (source: EP KR)
G02B 6/02 (2013.01 - KR); G02B 6/13 (2013.01 - EP); G02B 2006/121 (2013.01 - EP); G02B 2006/12107 (2013.01 - EP); G02B 2006/12147 (2013.01 - EP); G02B 2006/12159 (2013.01 - EP)
Designated contracting state (EPC)
DE FR IT NL
DOCDB simple family (publication)
WO 0123923 A1 20010405; AU 7989300 A 20010430; CN 1377470 A 20021030; EP 1266249 A1 20021218; EP 1266249 A4 20030716; JP 2003510656 A 20030318; KR 20020038786 A 20020523; TW 526342 B 20030401
DOCDB simple family (application)
US 0026939 W 20000929; AU 7989300 A 20000929; CN 00813577 A 20000929; EP 00970526 A 20000929; JP 2001527251 A 20000929; KR 20027004133 A 20020329; TW 89127821 A 20001226