Global Patent Index - EP 1269619 A2

EP 1269619 A2 20030102 - TWO-DIMENSIONAL GIMBALED SCANNING ACTUATOR WITH VERTICAL ELECTROSTATIC COMB-DRIVE FOR ACTUATION AND/OR SENSING

Title (en)

TWO-DIMENSIONAL GIMBALED SCANNING ACTUATOR WITH VERTICAL ELECTROSTATIC COMB-DRIVE FOR ACTUATION AND/OR SENSING

Title (de)

KARDANISCHE ZWEIDIMENSIONALE ABTASTVORRICHTUNG MIT VERTIKALEN KAMMFÖRMIGEN ELEKTROSTATISCHEN ANTRIEBSVORRICHTUNGEN ZUR BETÄTIGUNG UND/ODER MESSUNG

Title (fr)

ACTIONNEUR DE BALAYAGE BIDIMENSIONNEL A CARDAN DOTE DE XXX VERTICAL ELECTROSTATIQUE PERMETTANT L'ACTIVATION ET/OU LA DETECTION

Publication

EP 1269619 A2 20030102 (EN)

Application

EP 01924326 A 20010322

Priority

  • US 0109611 W 20010322
  • US 19198700 P 20000324
  • US 19185600 P 20000324
  • US 19109700 P 20000324
  • US 75166000 A 20001228

Abstract (en)

[origin: WO0173937A2] A two-dimensional scanner consists of a rotatable gimbal structure with vertical electrostatic comb-drive actuators and sensors. The scanner's two axes of rotation may be controlled independently by activating two sets of vertical comb-drive actuators. The first set of vertical comb-drive actuator is positioned in between a outer frame of the gimbal structure and the base, and the second set of vertical comb-drive actuator is positioned in between the iner part of the gimbal structure and the outer frame of the gimbal structure. The inner part of the gimbal structure may include a reflective surface, and the device may be used as a mirror. Furthermore, the capacitance of the vertical comb-drives may be measured to monitor the angular position of the mirror, and the capacitive position-monitoring signal may be used to implement closed-loop feedback control of the mirror angle. The two-dimensional scanner may be fabricated in a semiconductor process. Two-dimensional scanners may be used to produce fiber-optic switches.

IPC 1-7

H02N 1/00; G02B 26/00

IPC 8 full level

G02B 6/35 (2006.01); G02B 26/08 (2006.01); H02N 1/00 (2006.01)

CPC (source: EP)

G02B 6/357 (2013.01); G02B 26/0833 (2013.01); G02B 26/085 (2013.01); G02B 26/0858 (2013.01); G02B 26/0866 (2013.01); H02N 1/008 (2013.01); G02B 6/3518 (2013.01); G02B 6/3556 (2013.01)

Citation (search report)

See references of WO 0173937A3

Designated contracting state (EPC)

AT BE CH CY DE DK ES FI FR GB GR IE IT LI LU MC NL PT SE TR

DOCDB simple family (publication)

WO 0173937 A2 20011004; WO 0173937 A3 20020103; AU 5098901 A 20011008; EP 1269619 A2 20030102

DOCDB simple family (application)

US 0109611 W 20010322; AU 5098901 A 20010322; EP 01924326 A 20010322