EP 1272811 A1 20030108 - INTERFEROMETRIC MEASURING DEVICE
Title (en)
INTERFEROMETRIC MEASURING DEVICE
Title (de)
INTERFEROMETRISCHE MESSVORRICHTUNG
Title (fr)
DISPOSITIF DE MESURE INTERFEROMETRIQUE
Publication
Application
Priority
- DE 0200967 W 20020316
- DE 10117658 A 20010409
- DE 10123844 A 20010516
Abstract (en)
[origin: WO02082007A1] The invention relates to an interferometric measuring device for measuring the surface or boundary surface of an object of measurement (O). The aim of the invention is to prevent vibrations from influencing the result of measurement. To this end, a connecting unit (VE) is provided which directly links, in a mechanically rigid and detachable manner, the object of measurement (O) with at least one section of the measuring device associated with the object of measurement (O).
IPC 1-7
IPC 8 full level
G01B 9/02 (2006.01)
CPC (source: EP)
G01B 9/02049 (2013.01); G01B 9/02057 (2013.01); G01B 9/02065 (2013.01); G01B 9/02076 (2013.01); G01B 9/0209 (2013.01)
Citation (search report)
See references of WO 02082007A1
Designated contracting state (EPC)
AT BE CH CY DE DK ES FI FR GB GR IE IT LI LU MC NL PT SE TR
DOCDB simple family (publication)
WO 02082007 A1 20021017; EP 1272811 A1 20030108; JP 2004518985 A 20040624; JP 4373094 B2 20091125
DOCDB simple family (application)
DE 0200967 W 20020316; EP 02740218 A 20020316; JP 2002579734 A 20020316