EP 1282919 A1 20030212 - INDIUM-TIN-OXIDE (ITO) LAYER AND METHOD FOR PRODUCING THE SAME
Title (en)
INDIUM-TIN-OXIDE (ITO) LAYER AND METHOD FOR PRODUCING THE SAME
Title (de)
INDIUM-ZINN-OXID (ITO)-SCHICHT UND VERFAHREN ZUR HERSTELLUNG DERSELBEN
Title (fr)
COUCHE D'OXYDE D'ETAIN ET D'INDIUM (ITO) ET SON PROCEDE DE PRODUCTION
Publication
Application
Priority
- DE 10023459 A 20000512
- EP 0105060 W 20010504
Abstract (en)
[origin: WO0186731A1] The invention relates to a method for precipitating transparent and conductive indium-tin-oxide (ITO) layers, which have a particularly low resistance of preferably less than 200 mu OMEGA cm and a low degree of surface roughness of preferably less than 1 nm, onto a substrate. To this end, a combined HF/DC sputtering of an indium-tin-oxide (ITO) target is used in which an Ar/H2 mixture serving as a reaction gas is fed to the process gas during sputtering. The invention also relates to (ITO) layers having the aforementioned properties.
IPC 1-7
IPC 8 full level
H01L 51/50 (2006.01); C23C 14/08 (2006.01); C23C 14/34 (2006.01); H01B 5/14 (2006.01); H01B 13/00 (2006.01); H01L 31/0224 (2006.01); H01L 31/18 (2006.01); H05B 33/28 (2006.01)
CPC (source: EP KR US)
C23C 14/086 (2013.01 - EP US); C23C 14/34 (2013.01 - KR); H01L 31/022475 (2013.01 - EP US); H01L 31/1884 (2013.01 - EP US); H10K 50/81 (2023.02 - EP KR US); H10K 2101/00 (2023.02 - EP KR US); Y02E 10/50 (2013.01 - US); Y10T 428/265 (2015.01 - EP US)
Designated contracting state (EPC)
AT BE CH CY DE FR GB LI NL
DOCDB simple family (publication)
WO 0186731 A1 20011115; DE 10023459 A1 20011115; EP 1282919 A1 20030212; JP 2003532997 A 20031105; JP 5144868 B2 20130213; KR 100821353 B1 20080410; KR 20030024665 A 20030326; TW I253477 B 20060421; US 2003170449 A1 20030911; US 2005175862 A1 20050811; US 6849165 B2 20050201; US 7285342 B2 20071023
DOCDB simple family (application)
EP 0105060 W 20010504; DE 10023459 A 20000512; EP 01933932 A 20010504; JP 2001582848 A 20010504; KR 20027015177 A 20010504; TW 90111425 A 20010514; US 27620203 A 20030501; US 98659704 A 20041111