EP 1284806 A1 20030226 - GAS CABINET ASSEMBLY COMPRISING SORBENT-BASED GAS STORAGE AND DELIVERY SYSTEM
Title (en)
GAS CABINET ASSEMBLY COMPRISING SORBENT-BASED GAS STORAGE AND DELIVERY SYSTEM
Title (de)
GASGEHÄUSEAUFBAU, BESTEHEND AUS SORBENSBASIERTER GASSPEICHERUNG UND VERTEILSYSTEM
Title (fr)
ENSEMBLE ARMOIRE A GAZ COMPRENANT UN SYSTEME DE STOCKAGE ET DE DISTRIBUTION DE GAZ A BASE SORBANT
Publication
Application
Priority
- US 0113922 W 20010427
- US 56432300 A 20000503
Abstract (en)
[origin: WO0183084A1] A gas supply system including a gas cabinet (402) defining an enclosure including therein a gas dispensing manifold (426) and one or more adsorbent-based gas storage and dispensing vessels (433),(460),(462) mounted in the enclosure and joined in gas flow communication with the gas dispensing manifold (426). The enclosure may be maintained under low or negative pressure conditions for enhanced safety in the event of leakage of gas from the gas storage and dispensing vessels (433),(460),(462) in the enclosure. The gas supply system may be coupled to a gas-consuming unit in a semiconductor manufacturing facility, e.g., an ion implanter, an etch chamber, or a chemical vapor deposition reactor.
IPC 1-7
IPC 8 full level
B01D 53/04 (2006.01); B01D 53/22 (2006.01); B01J 4/00 (2006.01); B01J 20/18 (2006.01); B01J 20/26 (2006.01); C23C 16/448 (2006.01); F17C 7/00 (2006.01); F17C 11/00 (2006.01); F17C 13/04 (2006.01); F17C 13/08 (2006.01); H01L 21/02 (2006.01); H01L 21/205 (2006.01); H01L 21/3065 (2006.01)
CPC (source: EP KR)
B01D 53/04 (2013.01 - KR); F17C 7/00 (2013.01 - EP); F17C 11/00 (2013.01 - EP); F17C 13/04 (2013.01 - EP); F17C 13/045 (2013.01 - EP); F17C 2205/0338 (2013.01 - EP); F17C 2205/0391 (2013.01 - EP); F17C 2223/0123 (2013.01 - EP); F17C 2223/038 (2013.01 - EP); F17C 2270/0518 (2013.01 - EP)
Designated contracting state (EPC)
DE FR IE IT NL
DOCDB simple family (publication)
WO 0183084 A1 20011108; AU 5743901 A 20011112; CN 1204954 C 20050608; CN 1452507 A 20031029; EP 1284806 A1 20030226; EP 1284806 A4 20060315; JP 2003532034 A 20031028; KR 100858077 B1 20080911; KR 20030034065 A 20030501
DOCDB simple family (application)
US 0113922 W 20010427; AU 5743901 A 20010427; CN 01808979 A 20010427; EP 01930952 A 20010427; JP 2001579949 A 20010427; KR 20027014732 A 20010427