EP 1284840 A2 20030226 - PNEUMATIC DIAPHRAGM HEAD HAVING AN INDEPENDENT RETAINING RING AND MULTI-REGION PRESSURE CONTROL, AND METHOD TO USE THE SAME
Title (en)
PNEUMATIC DIAPHRAGM HEAD HAVING AN INDEPENDENT RETAINING RING AND MULTI-REGION PRESSURE CONTROL, AND METHOD TO USE THE SAME
Title (de)
TRÄGERKOPF MIT EINEM PNEUMATISCHEM DIAPHRAGMA DER EINEN HALTERRING UND EINE DAVON UNABHÄNGIGE MULTI-REGION DRUCKSTEUERUNG HAT, UND VERFAHREN ZUR DESSEN ANWENDUNG
Title (fr)
SYSTEME ET PROCEDE DE PLANARISATION CHIMICOMECANIQUE PAR TETE A MEMBRANE PNEUMATIQUE COMPORTANT UN ANNEAU DE MAINTIEN ET UNE COMMANDE DE PRESSION SEPAREE POUR DIFFERENTES ZONES DES TRANCHES
Publication
Application
Priority
- US 0115306 W 20010511
- US 20421200 P 20000512
- US 57036900 A 20000512
- US 57037000 A 20000512
Abstract (en)
[origin: WO0187541A2] An apparatus and method for planarizing a substrate are provided. The apparatus (101) includes a carrier (106) having: a plate (261) for receiving the substrate (230) thereon; a first chamber (297) for forcing the plate in a predetermined direction; a spacer (260) coupled to an outer edge (282) of the plate; a membrane (250) coupled to the plate via the spacer and separated from the plate by a thickness of the spacer; and a second chamber (298) defined between the membrane and the plate for forcing the membrane in another predetermined direction. The method involves pressing a peripheral edge of the substrate (113) against a polishing pad (135) with a first pressure, and pressing an interior of the substrate against the pad with a second pressure. The first pressure may be provided through a mechanical contact with the peripheral edge of the substrate (113), a pneumatic pressure exerted through a membrane (250), or by gas pressing directly against a portion of the substrate.
IPC 1-7
IPC 8 full level
B24B 37/30 (2012.01); B24B 37/32 (2012.01); B24B 49/16 (2006.01); H01L 21/304 (2006.01)
CPC (source: EP KR)
B24B 37/30 (2013.01 - EP); B24B 37/32 (2013.01 - EP); B24B 49/16 (2013.01 - EP); H01L 21/304 (2013.01 - KR)
Citation (search report)
See references of WO 0187541A2
Designated contracting state (EPC)
AT BE CH CY DE DK ES FI FR GB GR IE IT LI LU MC NL PT SE TR
DOCDB simple family (publication)
WO 0187541 A2 20011122; WO 0187541 A3 20020328; AU 5974501 A 20011126; CN 100433269 C 20081112; CN 1179821 C 20041215; CN 1440321 A 20030903; CN 1638057 A 20050713; EP 1284840 A2 20030226; JP 2003533359 A 20031111; KR 100811172 B1 20080310; KR 20030010621 A 20030205
DOCDB simple family (application)
US 0115306 W 20010511; AU 5974501 A 20010511; CN 01812171 A 20010511; CN 200410088199 A 20010511; EP 01933311 A 20010511; JP 2001583983 A 20010511; KR 20027015207 A 20010511