EP 1287314 A1 20030305 - PROBE WITH A DIFFRACTION GRATING FOR +1, 0 AND -1 ORDERS
Title (en)
PROBE WITH A DIFFRACTION GRATING FOR +1, 0 AND -1 ORDERS
Title (de)
TASTER MIT BEUGUNGSGITTER FÜR +1, 0 UND -1 ORDNUNGEN
Title (fr)
PALPEUR DOTE D'UN RESEAU DE DIFFRACTION DES ORDRES +1, 0 ET -1
Publication
Application
Priority
- DE 0101871 W 20010518
- DE 10025461 A 20000523
Abstract (en)
[origin: WO0190698A1] A measuring device using interference optics, for detecting and tracking the movement of a mechanical element (4) has a light source (31) for emitting a light bundle that is capable of interference, a diffraction grating and a sensor arrangement (33). A beam path leads from the light source to the sensor arrangement (33) via the diffraction grating (32). Said diffraction grating divides the light bundle into at least three partial components, so that a light patch with three overlapping peaks, the middle, zero peak and the minus one and plus one peaks either side thereof, is formed. The light beams producing the three brightness peaks interfere with each other so that the resulting superimposed luminous spot (46) contains interference bands which run in one direction or another when the diffraction grating is moved. The movement of the interference bands is detected with the sensor arrangement (33) and evaluated in an evaluation circuit. This enables each movement of the diffraction grating (32) to be detected precisely. The arrangement makes use of almost the entire interference figure generated by the light from the light source. As a result, light-intensive interference figures can be produced even with low capacities of the light source (31). This enables low-capacity components to be used.
IPC 1-7
IPC 8 full level
G01B 11/24 (2006.01); G01B 11/30 (2006.01); G01D 5/38 (2006.01)
CPC (source: EP US)
G01B 11/24 (2013.01 - EP US); G01B 11/303 (2013.01 - EP US); G01D 5/38 (2013.01 - EP US)
Citation (search report)
See references of WO 0190698A1
Designated contracting state (EPC)
DE FR GB IT
DOCDB simple family (publication)
WO 0190698 A1 20011129; DE 10025461 A1 20011206; EP 1287314 A1 20030305; US 2003117633 A1 20030626
DOCDB simple family (application)
DE 0101871 W 20010518; DE 10025461 A 20000523; EP 01943100 A 20010518; US 29639402 A 20021125