EP 1287592 A4 20051109 - GAS DISCHARGE LASER WITH BLADE-DIELECTRIC ELECTRODE
Title (en)
GAS DISCHARGE LASER WITH BLADE-DIELECTRIC ELECTRODE
Title (de)
GASENTLADUNGSLASER MIT EINER DIELEKTRISCHEN KLINGENELEKTRODE
Title (fr)
LASER A GAZ AVEC ELECTRODE DI-ELECTRIQUE A LAME
Publication
Application
Priority
- US 0112815 W 20010420
- US 59096100 A 20000609
- US 76875301 A 20010123
Abstract (en)
[origin: WO0197343A1] A gas discharge laser having a laser chamber with two elongated erodable electrode elements, at least one of the electrode elements (72) having a generally blunt blade-shaped portion comprised of a material having high electrical conductivity with a flow shaping dielectric fairing (74) positioned on two sides of the blunt blade shaped portion (72). A pulse power system provides electrical pulses at rates of at least 1 KHz. A blower circulates laser gas between the electrodes at speeds of at least 10m/s and a heat exchanger is provided to remove heat produced by the blower and the discharges.
IPC 1-7
IPC 8 full level
G03F 7/20 (2006.01); H01S 3/036 (2006.01); H01S 3/038 (2006.01); H01S 3/223 (2006.01); H01S 3/225 (2006.01); H01S 3/041 (2006.01); H01S 3/0979 (2006.01); H01S 3/22 (2006.01)
CPC (source: EP)
G03F 7/70025 (2013.01); G03F 7/70041 (2013.01); G03F 7/70575 (2013.01); G03F 7/70933 (2013.01); H01S 3/036 (2013.01); H01S 3/038 (2013.01); H01S 3/223 (2013.01); H01S 3/225 (2013.01); H01S 3/0381 (2013.01); H01S 3/0385 (2013.01); H01S 3/0387 (2013.01); H01S 3/041 (2013.01); H01S 3/0979 (2013.01); H01S 3/22 (2013.01); H01S 3/2207 (2013.01)
Citation (search report)
- [Y] WO 9960679 A1 19991125 - CYMER INC [US], et al
- [Y] DE 4401892 A1 19950727 - LAMBDA PHYSIK FORSCHUNG [DE]
- [Y] US 4481634 A 19841106 - GROSSMAN JONATHAN G [US], et al
- [Y] US 4723255 A 19880202 - COHN DAVID B [US], et al
- [Y] US 5923693 A 19990713 - OHMI TADAHIRO [JP], et al
- [Y] US 4833686 A 19890523 - ELDRIDGE ROBERT E [US]
- [A] US 5535233 A 19960709 - MIZOGUCHI HAKARU [JP], et al
- [Y] PATENT ABSTRACTS OF JAPAN vol. 014, no. 413 (E - 0974) 6 September 1990 (1990-09-06)
- [Y] PATENT ABSTRACTS OF JAPAN vol. 018, no. 240 (E - 1545) 9 May 1994 (1994-05-09)
- See references of WO 0197343A1
Designated contracting state (EPC)
AT BE DE NL
DOCDB simple family (publication)
WO 0197343 A1 20011220; AU 6103701 A 20011224; EP 1287592 A1 20030305; EP 1287592 A4 20051109; JP 2002094151 A 20020329; TW I222250 B 20041011
DOCDB simple family (application)
US 0112815 W 20010420; AU 6103701 A 20010420; EP 01934890 A 20010420; JP 2001214506 A 20010611; TW 90113992 A 20010608