Global Patent Index - EP 1292176 A3

EP 1292176 A3 20080702 - Device for the production of an active gas beam

Title (en)

Device for the production of an active gas beam

Title (de)

Vorrichtung zum Erzeugen eines Aktivgasstrahls

Title (fr)

Dispositif de production d'un jet de gas actif

Publication

EP 1292176 A3 20080702 (DE)

Application

EP 02019754 A 20020904

Priority

DE 10145131 A 20010907

Abstract (en)

[origin: EP1292176A2] The plasma is generated in a cylindrical discharge chamber (2) with a conically narrowing end (21) that increases the speed of the active gas jet (6). Adjoining the narrowing end is a limiting channel (4) that prevents the spreading out of the discharge zone (22) into free space. The limiting channel is cylindrical, earthed and has a length that is 5 to 10 times greater than its diameter.

IPC 8 full level

H05H 1/30 (2006.01); H05H 1/34 (2006.01)

CPC (source: EP US)

H05H 1/30 (2013.01 - EP US); H05H 1/3484 (2021.05 - EP); H05H 1/3484 (2021.05 - US)

Citation (search report)

Designated contracting state (EPC)

AT BE BG CH CY CZ DE DK EE ES FI FR GB GR IE IT LI LU MC NL PT SE SK TR

Designated extension state (EPC)

AL LT LV MK RO SI

DOCDB simple family (publication)

EP 1292176 A2 20030312; EP 1292176 A3 20080702; EP 1292176 B1 20091209; EP 1292176 B8 20100519; AT E451824 T1 20091215; CA 2399493 A1 20030307; CA 2399493 C 20110524; DE 10145131 A1 20030327; DE 10145131 B4 20040708; DE 50214062 D1 20100121; ES 2337657 T3 20100428; US 2003047540 A1 20030313; US 6943316 B2 20050913

DOCDB simple family (application)

EP 02019754 A 20020904; AT 02019754 T 20020904; CA 2399493 A 20020822; DE 10145131 A 20010907; DE 50214062 T 20020904; ES 02019754 T 20020904; US 23674702 A 20020906