EP 1292176 B1 20091209 - Device for the production of an active gas beam
Title (en)
Device for the production of an active gas beam
Title (de)
Vorrichtung zum Erzeugen eines Aktivgasstrahls
Title (fr)
Dispositif de production d'un jet de gas actif
Publication
Application
Priority
DE 10145131 A 20010907
Abstract (en)
[origin: EP1292176A2] The plasma is generated in a cylindrical discharge chamber (2) with a conically narrowing end (21) that increases the speed of the active gas jet (6). Adjoining the narrowing end is a limiting channel (4) that prevents the spreading out of the discharge zone (22) into free space. The limiting channel is cylindrical, earthed and has a length that is 5 to 10 times greater than its diameter.
IPC 8 full level
CPC (source: EP US)
H05H 1/30 (2013.01 - EP US); H05H 1/3484 (2021.05 - EP); H05H 1/3484 (2021.05 - US)
Designated contracting state (EPC)
AT BE BG CH CY CZ DE DK EE ES FI FR GB GR IE IT LI LU MC NL PT SE SK TR
DOCDB simple family (publication)
EP 1292176 A2 20030312; EP 1292176 A3 20080702; EP 1292176 B1 20091209; EP 1292176 B8 20100519; AT E451824 T1 20091215; CA 2399493 A1 20030307; CA 2399493 C 20110524; DE 10145131 A1 20030327; DE 10145131 B4 20040708; DE 50214062 D1 20100121; ES 2337657 T3 20100428; US 2003047540 A1 20030313; US 6943316 B2 20050913
DOCDB simple family (application)
EP 02019754 A 20020904; AT 02019754 T 20020904; CA 2399493 A 20020822; DE 10145131 A 20010907; DE 50214062 T 20020904; ES 02019754 T 20020904; US 23674702 A 20020906