EP 1293297 A4 20030910 - POLISHING PAD
Title (en)
POLISHING PAD
Title (de)
POLIERKISSEN
Title (fr)
TAMPON A POLIR
Publication
Application
Priority
- JP 0105192 W 20010618
- JP 2000183846 A 20000619
Abstract (en)
[origin: EP1293297A1] A polishing pad includes a pad body; and a transparent window integrally formed in the pad body. The window is formed of a material which is more susceptible to abrasion than a material of the pad body. The pad body has a plurality of grooves formed in a surface thereof, and the window has no grooves in a surface thereof. A surface of the window is recessed with respect to a surface of the pad . The polishing pad prevents a slurry from settling on the window so as to improve the detection precision of the polishing rate. Furthermore, the polishing pad prevents the window from gradually projecting with respect to the pad body by dressing during polishing so as to substantially eliminate adverse effect on the polishing characteristic. <IMAGE>
IPC 1-7
B24B 37/04; H01L 21/304; B24B 49/04; B24B 49/12; B24D 7/12; G01B 11/06
IPC 8 full level
B24B 37/20 (2012.01); B24B 37/22 (2012.01); B24B 37/24 (2012.01); B24B 37/26 (2012.01); B24B 53/007 (2006.01); B24D 7/12 (2006.01); H01L 21/304 (2006.01)
CPC (source: EP KR US)
B24B 37/205 (2013.01 - EP US); B24B 37/26 (2013.01 - EP US); B24B 53/017 (2013.01 - EP US); H01L 21/304 (2013.01 - KR)
Citation (search report)
- [X] EP 0941806 A2 19990915 - LAM RES CORP [US]
- [A] JP H1177517 A 19990323 - NIKON CORP
- See references of WO 0198028A1
Designated contracting state (EPC)
AT BE CH CY DE DK ES FI FR GB GR IE IT LI LU MC NL PT SE TR
DOCDB simple family (publication)
EP 1293297 A1 20030319; EP 1293297 A4 20030910; CN 1437520 A 20030820; JP 2002001647 A 20020108; KR 100522735 B1 20051020; KR 100561210 B1 20060315; KR 20030009542 A 20030129; KR 20050050682 A 20050531; US 2003171081 A1 20030911; WO 0198028 A1 20011227
DOCDB simple family (application)
EP 01938730 A 20010618; CN 01811428 A 20010618; JP 0105192 W 20010618; JP 2000183846 A 20000619; KR 20027017249 A 20010618; KR 20057008859 A 20050517; US 31150302 A 20021216