EP 1294639 A1 20030326 - METHOD FOR PRODUCING SILICON NITRIDE
Title (en)
METHOD FOR PRODUCING SILICON NITRIDE
Title (de)
VERFAHREN ZUR GEWINNUNG VON SILICIUMNITRID
Title (fr)
PROCEDE D'OBTENTION DE NITRURE DE SILICIUM
Publication
Application
Priority
- DE 0102229 W 20010615
- DE 10029903 A 20000617
- DE 10029902 A 20000617
- DE 10029911 A 20000617
- DE 10039753 A 20000816
- DE 10039752 A 20000816
- DE 10039751 A 20000816
Abstract (en)
[origin: US2003165417A1] A process for the production of silicon nitride (Si3N4) is described. According to this process nitrogen and/or nitrogen compounds are reacted with silicon and/or silicon compounds in a reaction chamber by means of a subgroup element or a subgroup element oxide. The process can be carried out in a simple and rapid manner and has a high yield.
IPC 1-7
IPC 8 full level
C01B 21/068 (2006.01); C01B 33/20 (2006.01); C01C 1/02 (2006.01)
CPC (source: EP US)
C01B 21/068 (2013.01 - EP US); C01B 21/0682 (2013.01 - EP US); C01B 33/20 (2013.01 - EP US); C01C 1/026 (2013.01 - EP US); Y02P 20/129 (2015.11 - EP US)
Citation (search report)
See references of WO 0198205A1
Designated contracting state (EPC)
AT BE CH CY DE DK ES FI FR GB GR IE IT LI LU MC NL PT SE TR
DOCDB simple family (publication)
US 2003165417 A1 20030904; AU 7233901 A 20020102; EP 1294639 A1 20030326; WO 0198205 A1 20011227
DOCDB simple family (application)
US 31150803 A 20030212; AU 7233901 A 20010615; DE 0102229 W 20010615; EP 01951386 A 20010615