Global Patent Index - EP 1295321 A1

EP 1295321 A1 20030326 - PLANARIZATION PROCESS TO ACHIEVE IMPROVED UNIFORMITY ACROSS SEMICONDUCTOR WAFERS

Title (en)

PLANARIZATION PROCESS TO ACHIEVE IMPROVED UNIFORMITY ACROSS SEMICONDUCTOR WAFERS

Title (de)

PLANARISIERUNGSVERFAHREN ZUR VERBESSERUNG DER GLEICHFÖRMIGKEIT VON HALBLEITERSCHEIBEN

Title (fr)

PROCEDE DE PLANARISATION PERMETTANT D'OBTENIR UNE UNIFORMITE AMELIOREE SUR DES PLAQUETTES DE SEMI-CONDUCTEURS

Publication

EP 1295321 A1 20030326 (EN)

Application

EP 01906705 A 20010126

Priority

  • US 0102616 W 20010126
  • US 49164500 A 20000127
  • US 49254100 A 20000127

IPC 1-7

H01L 21/3105

IPC 8 full level

H01L 21/3105 (2006.01)

Citation (search report)

See references of WO 0156070A1

Citation (examination)

Designated contracting state (EPC)

AT BE CH CY DE FR GB IE IT LI

DOCDB simple family (publication)

EP 1295321 A1 20030326

DOCDB simple family (application)

EP 01906705 A 20010126