EP 1295329 A2 20030326 - METHOD OF CONTROLLING WELL LEAKAGE FOR TRENCH ISOLATIONS OF DIFFERING DEPTHS
Title (en)
METHOD OF CONTROLLING WELL LEAKAGE FOR TRENCH ISOLATIONS OF DIFFERING DEPTHS
Title (de)
VERFAHREN ZUR KONTROLLE EINER WANNENLECKAGE BEI GRABENISOLATIONEN VERSCHIEDENER TIEFEN
Title (fr)
PROCEDE PERMETTANT DE CONTROLER LES FUITES DE PUITS POUR DES ISOLATIONS DE TRANCHES DE DIFFERENTES PROFONDEURS
Publication
Application
Priority
- US 0112360 W 20010416
- US 57876000 A 20000525
Abstract (en)
[origin: WO0193311A2] A method comprising forming a trench (22) in a semiconducting substrate (10) and forming an isolation material (24) in said trench (22). The method further comprises determining at least one of the depth of said trench (22) and the thickness of said trench isolation material (24) and determining an energy level for an ion implantation process to be performed through said isolation material (24) based upon at least one of said determined depth of said trench (22) and said determined thickness of said isolation material (24).
IPC 1-7
IPC 8 full level
H01L 21/76 (2006.01); H01L 21/265 (2006.01); H01L 21/66 (2006.01); H01L 21/762 (2006.01)
CPC (source: EP KR)
H01L 21/76 (2013.01 - KR); H01L 21/76237 (2013.01 - EP); H01L 22/20 (2013.01 - EP)
Citation (search report)
See references of WO 0193311A2
Designated contracting state (EPC)
DE GB
DOCDB simple family (publication)
WO 0193311 A2 20011206; WO 0193311 A3 20020411; AU 5541401 A 20011211; CN 1437765 A 20030820; EP 1295329 A2 20030326; JP 2003535468 A 20031125; KR 20030005391 A 20030117
DOCDB simple family (application)
US 0112360 W 20010416; AU 5541401 A 20010416; CN 01810025 A 20010416; EP 01928571 A 20010416; JP 2002500431 A 20010416; KR 20027015882 A 20021123