EP 1297556 A1 20030402 - STORAGE AND BUFFER SYSTEM WITH TRANSPORT ELEMENTS
Title (en)
STORAGE AND BUFFER SYSTEM WITH TRANSPORT ELEMENTS
Title (de)
LAGER- BZW- PUFFERSYSTEM MIT FÖRDERELEMENTEN
Title (fr)
SYSTEME D'AMORTISSEMENT ET DE STOCKAGE A ELEMENTS DE TRANSPORT
Publication
Application
Priority
- CH 0100396 W 20010626
- CH 13392000 A 20000706
Abstract (en)
[origin: WO0203424A1] The invention relates to a storage and buffer system (12) for connection to transport units for containers, such as for example, cassettes (7), FOUP pods (8), or SMIF boxes for the storage of wafers (9) and similar, comprising a number of conveyor elements (1), arranged along a conveyor line (13), whereby the conveyor elements (1) are arranged in at least one storage line (14), running essentially horizontal, next to, under or over the transport line (13), whilst maintaining a transfer position relative to the adjacent conveyor elements (1). The system further comprises a means of rotation (17) with at least one conveyor element (1), by means of which the containers (7, 8) can be transferred in a horizontal direction from the conveyor line (13) to a storage line (14) and vice versa, or from one storage line to another.
IPC 1-7
IPC 8 full level
H01L 21/677 (2006.01)
CPC (source: CH EP KR US)
H01L 21/00 (2013.01 - KR); H01L 21/67715 (2013.01 - EP US); H01L 21/67718 (2013.01 - EP US); H01L 21/6773 (2013.01 - CH EP US)
Citation (search report)
See references of WO 0203424A1
Designated contracting state (EPC)
CH DE FR LI
DOCDB simple family (publication)
WO 0203424 A1 20020110; AU 7376001 A 20020114; CH 714282 B1 20190430; EP 1297556 A1 20030402; KR 100764939 B1 20071008; KR 20030026305 A 20030331; US 2003161714 A1 20030828
DOCDB simple family (application)
CH 0100396 W 20010626; AU 7376001 A 20010626; CH 13392000 A 20000706; EP 01940044 A 20010626; KR 20037000028 A 20030103; US 33207003 A 20030409