EP 1305984 A1 20030502 - METHOD AND APPARATUS FOR GENERATING X-RAY RADIATION
Title (en)
METHOD AND APPARATUS FOR GENERATING X-RAY RADIATION
Title (de)
VERFAHREN UND VORRICHTUNG ZUR ERZEUGUNG VON RÖNTGENSTRAHLUNG
Title (fr)
PROCEDE ET APPAREIL PERMETTANT DE GENERER DES RAYONS X
Publication
Application
Priority
- SE 0101646 W 20010718
- SE 0002785 A 20000728
- SE 0003073 A 20000831
Abstract (en)
[origin: WO0211499A1] In a method and an apparatus for generating X-ray or EUV radiation, an electron beam is brought to interact with a propagating target jet, typically in a vacuum chamber. The target jet is formed by urging a liquid substance under pressure through an outlet opening. Hard X-ray radiation may be generated by converting the electron-beam energy to Bremsstrahlung and characteristic line emission, essentially without heating the jet to a plasma-forming temperature. Soft X-ray or EUV radiation may be generated by the electron beam heating the jet to a plasma-forming temperature.
IPC 1-7
IPC 8 full level
G21K 5/00 (2006.01); G03F 7/20 (2006.01); G21K 5/02 (2006.01); G21K 5/08 (2006.01); G21K 7/00 (2006.01); H01J 35/08 (2006.01); H01L 21/027 (2006.01); H05G 2/00 (2006.01)
CPC (source: EP US)
H01J 35/112 (2019.04 - EP US); H05G 2/003 (2013.01 - EP); H01J 2235/082 (2013.01 - EP); H05G 2/005 (2013.01 - EP)
Citation (search report)
See references of WO 0211499A1
Designated contracting state (EPC)
AT BE CH CY DE DK ES FI FR GB GR IE IT LI LU MC NL PT SE TR
DOCDB simple family (publication)
WO 0211499 A1 20020207; AT E489838 T1 20101215; AU 7287301 A 20020213; CN 1272989 C 20060830; CN 1466860 A 20040107; DE 60143527 D1 20110105; EP 1305984 A1 20030502; EP 1305984 B1 20101124; JP 2004505421 A 20040219; JP 5073146 B2 20121114
DOCDB simple family (application)
SE 0101646 W 20010718; AT 01952078 T 20010718; AU 7287301 A 20010718; CN 01816396 A 20010718; DE 60143527 T 20010718; EP 01952078 A 20010718; JP 2002515466 A 20010718