EP 1307785 A2 20030507 - PROCESS FOR MANUFACTURING A MICROELECTRONIC DEVICE
Title (en)
PROCESS FOR MANUFACTURING A MICROELECTRONIC DEVICE
Title (de)
VERFAHREN ZUR ERZEUGUNG EINES MIKROELEKTRONISCHEN ELEMENTS
Title (fr)
PROCEDE DE FABRICATION D'UN DISPOSITIF MICRO-ELECTRONIQUE
Publication
Application
Priority
- EP 0108391 W 20010720
- US 62927900 A 20000731
Abstract (en)
[origin: WO0210858A2] The present invention relates to a process for manufacturing a microelectronic device, comprising providing a substrate with a photoresist image, coating the photoresist image with a shrink material, insolubilizing a portion of the shrink material in contact with the photoresist image, removing a portion of the shrink material which is not insolubilized with a removal solution, further where the removal solution comprises an aqueous solution of a surfactant.
IPC 1-7
IPC 8 full level
G03F 7/00 (2006.01); G03F 7/40 (2006.01); H01L 21/027 (2006.01); G03F 7/32 (2006.01)
CPC (source: EP KR)
G03F 7/0035 (2013.01 - EP); G03F 7/40 (2013.01 - EP); H01L 21/027 (2013.01 - KR); H01L 21/0274 (2013.01 - EP); G03F 7/322 (2013.01 - EP)
Citation (search report)
See references of WO 0210858A2
Designated contracting state (EPC)
AT BE CH CY DE DK ES FI FR GB GR IE IT LI LU MC NL PT SE TR
DOCDB simple family (publication)
WO 0210858 A2 20020207; WO 0210858 A3 20020808; CN 1564969 A 20050112; EP 1307785 A2 20030507; JP 2004505319 A 20040219; KR 20030043914 A 20030602; TW 536734 B 20030611
DOCDB simple family (application)
EP 0108391 W 20010720; CN 01813139 A 20010720; EP 01949500 A 20010720; JP 2002515525 A 20010720; KR 20037000899 A 20030121; TW 90114153 A 20010612