EP 1308969 B1 20090415 - Inductive microsensor flatly formed on a substrate
Title (en)
Inductive microsensor flatly formed on a substrate
Title (de)
Induktiver Mikrosensor, flach hergestellt auf einem Substrat
Title (fr)
Micro-capteur inductif formé à plat sur un substrat
Publication
Application
Priority
EP 01204214 A 20011106
Abstract (en)
[origin: EP1308969A1] A flat microcoil (2) formed on an integrated circuit (4), comprises long conductive segments (Si) with high aspect ratio, each segment arranged in perpendicular direction with respect to the adjacent long segment (Si+1). Each long segment is connected with the adjacent segment by a short segment, so as to form angles of 135 degrees with the long segments.
IPC 8 full level
H01F 5/00 (2006.01); H01F 17/00 (2006.01); H01L 25/00 (2006.01)
CPC (source: EP US)
H01F 5/003 (2013.01 - EP US); H01L 2924/0002 (2013.01 - EP US)
Designated contracting state (EPC)
CH DE FR GB LI
DOCDB simple family (publication)
EP 1308969 A1 20030507; EP 1308969 B1 20090415; DE 60138388 D1 20090528; JP 2003188015 A 20030704; US 2003085790 A1 20030508
DOCDB simple family (application)
EP 01204214 A 20011106; DE 60138388 T 20011106; JP 2002313945 A 20021029; US 25957002 A 20020930