EP 1309835 A1 20030514 - MICROMECHANICAL SPEED SENSOR AND A METHOD FOR THE PRODUCTION THEREOF
Title (en)
MICROMECHANICAL SPEED SENSOR AND A METHOD FOR THE PRODUCTION THEREOF
Title (de)
MIKROMECHANISCHER DREHRATENSENSOR UND VERFAHREN ZU SEINER HERSTELLUNG
Title (fr)
DETECTEUR DE VITESSE DE ROTATION MICROMECANIQUE ET SON PROCEDE DE PRODUCTION
Publication
Application
Priority
- DE 10040537 A 20000818
- EP 0109066 W 20010806
Abstract (en)
[origin: WO0214787A1] The invention relates to a micromechanical rotational speed sensor comprising a cardanic structure, capable of oscillation. Said sensor consists of two oscillating elements (4, 5), which are mounted so that they can pivot about two axes (A, B) that are aligned in a perpendicular manner in relation to one another. An excitation unit in the form of an electrode (7) causes the first oscillating element (4) to oscillate about the first rotational axis (A). A readout unit in the form of a readout electrode (8) registers a tilting or oscillation of the second oscillating element (5) about the second rotational axis (B) and uses said movement as a measure for the rotational speed of the sensor. Additional elements of mass (6a, 6b), which are symmetrically aligned, are located on the upper face (2a) and the lower face (2b) of the first oscillating element (4), said element forming a rocker. The sensor is produced from at least three individually machined wafers, which are subsequently combined to form a cover section (1), a central section (2) and a base section (3).
IPC 1-7
IPC 8 full level
G01C 19/56 (2012.01)
CPC (source: EP US)
G01C 19/5712 (2013.01 - EP US); Y10T 29/49007 (2015.01 - EP US)
Citation (search report)
See references of WO 0214787A1
Designated contracting state (EPC)
DE FR GB IT
DOCDB simple family (publication)
WO 0214787 A1 20020221; DE 10040537 A1 20020307; DE 10040537 B4 20040513; EP 1309835 A1 20030514; JP 2004506883 A 20040304; US 2004011130 A1 20040122; US 6898972 B2 20050531
DOCDB simple family (application)
EP 0109066 W 20010806; DE 10040537 A 20000818; EP 01980234 A 20010806; JP 2002519873 A 20010806; US 34492503 A 20030723