EP 1311835 A2 20030521 - X-RAY REFLECTIVITY APPARATUS AND METHOD
Title (en)
X-RAY REFLECTIVITY APPARATUS AND METHOD
Title (de)
RÖNTGENSTRAHLUNGSREFLEKTIONSVORRICHTUNG UND VERFAHREN
Title (fr)
APPAREIL ET PROCEDE A REFLECTIVITE DES RAYONS X
Publication
Application
Priority
- GB 0102441 W 20010601
- GB 0014587 A 20000614
Abstract (en)
[origin: WO0196841A2] A method and corresponding apparatus for determining one or more physical parameters, such as electron density, of a target surface of a sample are disclosed. The target surface is irradiated with X-rays of at least two different wavelengths over a range of angles of incidence, and the physical parameter is determined by combining measurements of the intensity of these X-rays following specular reflection. The X-rays at two different wavelengths may be simultaneously generated using a metal alloy anode.
IPC 1-7
IPC 8 full level
G01N 23/20 (2006.01)
CPC (source: EP)
G01N 23/20 (2013.01)
Citation (search report)
See references of WO 0196841A2
Designated contracting state (EPC)
AT BE CH CY DE DK ES FI FR GB GR IE IT LI LU MC NL PT SE TR
DOCDB simple family (publication)
WO 0196841 A2 20011220; WO 0196841 A3 20020510; CA 2412634 A1 20011220; EP 1311835 A2 20030521; GB 0014587 D0 20000809; JP 2004503771 A 20040205; NO 20025951 D0 20021211; NO 20025951 L 20030116
DOCDB simple family (application)
GB 0102441 W 20010601; CA 2412634 A 20010601; EP 01934187 A 20010601; GB 0014587 A 20000614; JP 2002510921 A 20010601; NO 20025951 A 20021211