EP 1313573 A2 20030528 - SEMICONDUCTOR WAFER CONTAINER CLEANING APPARATUS
Title (en)
SEMICONDUCTOR WAFER CONTAINER CLEANING APPARATUS
Title (de)
VORRICHTUNG ZUR REINIGUNG VON HALBLEITER-WAFER BEHÄLTERN
Title (fr)
APPAREIL DE NETTOYAGE DE CONTENANTS POUR PLAQUETTES SEMI-CONDUCTRICES
Publication
Application
Priority
- US 0141085 W 20010620
- US 61164200 A 20000707
- US 65839500 A 20000908
Abstract (en)
[origin: WO0217355A2] A cleaning system for cleaning boxes (52) or containers used to carry semiconductor wafers and other flat articles, has box holder assemblies (50)and a box door holder assembly (300) attached to a rotor (36) within an enclosure (38). Upper and lower hooks (96, 108, 314, 316) on the box holder and box door holder assemblies hold boxes (52) and doors (325) as the rotor spins. Liquid spray manifolds (406) have one or more spray nozzles (430) that spray at an angle toward or away from the direction of rotation of the rotor, or an angle up or down, rather than straight at the boxes in the box holder assemblies. Improved spray coverage and cleaning is achieved. Boxes and their doors, such as front opening unified pods (FOUP), are both efficiently cleaned and handled.
IPC 1-7
IPC 8 full level
H01L 21/304 (2006.01); B08B 3/02 (2006.01); B08B 3/12 (2006.01); B08B 9/08 (2006.01); B08B 9/32 (2006.01); H01L 21/00 (2006.01)
CPC (source: EP)
B08B 3/12 (2013.01); B08B 9/0861 (2013.01); B08B 9/32 (2013.01); H01L 21/67051 (2013.01)
Designated contracting state (EPC)
AT BE CH CY DE DK ES FI FR GB GR IE IT LI LU MC NL PT SE TR
DOCDB simple family (publication)
WO 0217355 A2 20020228; WO 0217355 A3 20020502; WO 0217355 A9 20030206; AU 1664602 A 20020304; EP 1313573 A2 20030528; EP 1313573 A4 20051130; JP 2004507102 A 20040304; TW 522054 B 20030301
DOCDB simple family (application)
US 0141085 W 20010620; AU 1664602 A 20010620; EP 01984548 A 20010620; JP 2002521329 A 20010620; TW 90116614 A 20010706