EP 1313889 A1 20030528 - METHOD AND DEVICE FOR CONTINUOUS COLD PLASMA DEPOSITION OF METAL COATINGS
Title (en)
METHOD AND DEVICE FOR CONTINUOUS COLD PLASMA DEPOSITION OF METAL COATINGS
Title (de)
VERFAHREN UND VORRICHTUNG ZUR KONTINUIERLICHEN KALTPLASMA-ABSCHEIDUNG VON METALLSCHICHTEN
Title (fr)
PROCEDE ET DISPOSITIF PERMETTANT LE DEPOT DE COUCHES METALLIQUES EN CONTINU PAR PLASMA FROID
Publication
Application
Priority
- EP 01962497 A 20010823
- BE 0100142 W 20010823
- EP 00202942 A 20000823
Abstract (en)
[origin: EP1182272A1] A method for the deposition of a metal layer on a substrate (1) uses a cold plasma inside an enclosure (7) heated to avoid the formation of a metal deposit at its surface. The enclosure has an inlet (21) and an outlet (22) for the substrate with a source of metal vapor between them, made up of an electrode to form a plasma (6) with the substrate or a separate electrically conducting element as a counter-electrode. The deposition metal is introduced in the liquid state in a retention tank (8) and is maintained as a liquid at an essentially constant level during the formation of the metal layer on the substrate. An Independent claim is included for the device used to put this method of coating a substrate into service.
IPC 1-7
IPC 8 full level
G02B 6/44 (2006.01); C03C 25/42 (2006.01); C23C 14/24 (2006.01); C23C 14/32 (2006.01); C23C 14/34 (2006.01); H01J 37/34 (2006.01)
CPC (source: EP US)
C23C 14/246 (2013.01 - EP US); C23C 14/32 (2013.01 - EP US); C23C 14/3414 (2013.01 - EP US); H01J 37/3408 (2013.01 - EP US); H01J 37/3432 (2013.01 - EP US)
Citation (search report)
See references of WO 0216664A1
Designated contracting state (EPC)
AT BE CH CY DE DK ES FI FR GB GR IE IT LI LU MC NL PT SE TR
DOCDB simple family (publication)
EP 1182272 A1 20020227; AU 8372501 A 20020304; BR 0113560 A 20030708; CA 2420243 A1 20020228; EP 1313889 A1 20030528; JP 2004507617 A 20040311; US 2004026234 A1 20040212; US 7156960 B2 20070102; WO 0216664 A1 20020228; ZA 200301531 B 20040225
DOCDB simple family (application)
EP 00202942 A 20000823; AU 8372501 A 20010823; BE 0100142 W 20010823; BR 0113560 A 20010823; CA 2420243 A 20010823; EP 01962497 A 20010823; JP 2002522334 A 20010823; US 36258503 A 20030818; ZA 200301531 A 20030225