EP 1314198 B1 20170308 - OVERLAY MARKS, METHODS OF OVERLAY MARK DESIGN AND METHODS OF OVERLAY MEASUREMENTS
Title (en)
OVERLAY MARKS, METHODS OF OVERLAY MARK DESIGN AND METHODS OF OVERLAY MEASUREMENTS
Title (de)
AUSRICHTSMARKEN, METHODEN ZUM ENTWURF VON AUSRICHTMARKEN, UND VERFAHREN ZUM MESSEN VON AUSRICHTFEHLERN
Title (fr)
REPERE DE SUPERPOSITION, PROCEDES SERVANT A CONCEVOIR DES REPERES DE SUPERPOSITION ET PROCEDES DE MESURE DE SUPERPOSITION
Publication
Application
Priority
- US 0141932 W 20010828
- US 22925600 P 20000830
- US 89498701 A 20010627
- US 30159101 P 20010627
- US 30148401 P 20010627
- US 30161301 P 20010627
- US 30176301 P 20010627
Abstract (en)
[origin: WO0219415A1] An overlay mark (70) for determining the relative shift between two or more successive layers of a substrate is disclosed. The overlay mark includes at least one test pattern (78) for determining the relative shift between a first and a second layer of the substrate in a first direction. The test pattern includes a first set of working zones (72, A, D) and a second set of working zones (72, B, C). The first set of working zones (72, A, D) are disposed on a first layer of the substrate and have at least two working zones diagonally opposed and spatially offset relative to one another. The second set of working zones (72B, C) are disposed on a second layer of the substrate and have at least two working zones diagonally opposed and spatially offset relative to one another. The first set of working zones are generally angled relative to the second set of working zones thus forming an "X" shaped test pattern.
IPC 8 full level
G03F 7/20 (2006.01); G03F 9/00 (2006.01); H01L 21/027 (2006.01); H01L 21/66 (2006.01); H01L 23/544 (2006.01)
CPC (source: EP)
G03F 7/70633 (2013.01)
Citation (examination)
- EP 0634702 A1 19950118 - CANON KK [JP]
- EP 0281030 A2 19880907 - IBM [US]
- US 5805290 A 19980908 - AUSSCHNITT CHRISTOPHER PERRY [US], et al
Designated contracting state (EPC)
DE FR GB NL
DOCDB simple family (publication)
WO 0219415 A1 20020307; EP 1314198 A1 20030528; EP 1314198 B1 20170308; JP 2004508711 A 20040318; JP 2012080131 A 20120419; JP 2014160868 A 20140904; JP 2016026331 A 20160212; JP 2016026332 A 20160212; JP 2017040941 A 20170223; JP 2017062492 A 20170330; JP 2020112807 A 20200727; JP 5180419 B2 20130410; JP 5663504 B2 20150204; JP 5945294 B2 20160705; JP 6313272 B2 20180418
DOCDB simple family (application)
US 0141932 W 20010828; EP 01971384 A 20010828; JP 2002524212 A 20010828; JP 2012009434 A 20120119; JP 2014098674 A 20140512; JP 2015219288 A 20151109; JP 2015219296 A 20151109; JP 2016227754 A 20161124; JP 2016228018 A 20161124; JP 2020040921 A 20200310