EP 1314890 A2 20030528 - Control system for vacuum pump
Title (en)
Control system for vacuum pump
Title (de)
Kontrollsystem für Vakuumpumpe
Title (fr)
Système de contrôle d'une pompe à vide
Publication
Application
Priority
JP 2001356469 A 20011121
Abstract (en)
A vacuum pump has an alternating current motor, a rotary shaft and a gas transferring body. The alternating current motor runs at a certain speed based on frequency of alternating current and is sufficiently supplied with the alternating current. Gas is transferred from a certain space by the gas transferring body driven by the alternating current motor through the rotary shaft. A method for controlling a vacuum pump includes keeping a rotational speed of the alternating current motor at a second predetermined rotational speed, detecting a value of the alternating current to the alternating current motor, keeping the rotational speed at a first predetermined rotational speed that is higher than the second predetermined rotational speed when the detected alternating current value exceeds a first predetermined value, and keeping the rotational speed at the second predetermined rotational speed when the detected alternating current value becomes equal to a second predetermined value. <IMAGE>
IPC 1-7
IPC 8 full level
F04B 49/06 (2006.01); F04C 28/02 (2006.01); F04C 28/08 (2006.01); F04C 18/12 (2006.01)
CPC (source: EP US)
F04C 25/02 (2013.01 - EP US); F04C 28/02 (2013.01 - EP US); F04C 28/08 (2013.01 - EP US); F04C 18/126 (2013.01 - EP US); F04C 2240/403 (2013.01 - EP US); F04C 2270/07 (2013.01 - EP US); F04C 2270/075 (2013.01 - EP US)
Citation (applicant)
JP H05231381 A 19930907 - HITACHI LTD
Designated contracting state (EPC)
DE FR GB
DOCDB simple family (publication)
EP 1314890 A2 20030528; EP 1314890 A3 20030820; JP 2003155981 A 20030530; US 2003123990 A1 20030703
DOCDB simple family (application)
EP 02025927 A 20021120; JP 2001356469 A 20011121; US 30006402 A 20021120