EP 1319130 A1 20030618 - TURBOMOLECULAR VACUUM PUMP WITH ROWS OF ROTOR BLADES AND ROWS OF STATOR BLADES
Title (en)
TURBOMOLECULAR VACUUM PUMP WITH ROWS OF ROTOR BLADES AND ROWS OF STATOR BLADES
Title (de)
TURBOMOLEKULARVAKUUMPUMPE MIT ROTORSCHAUFELREIHEN UND STATORSCHAUFELREIHEN
Title (fr)
POMPE A VIDE TURBOMOLECULAIRE COMPRENANT DES ALIGNEMENTS D'AILETTES DE ROTOR ET DES ALIGNEMENTS D'AILETTES DE STATOR
Publication
Application
Priority
- DE 10046506 A 20000920
- EP 0109195 W 20010809
Abstract (en)
[origin: WO0225116A1] The invention relates to a turbomolecular vacuum pump comprising rows of rotor blades (3) and rows of stator blades (4) that alternately engage with one another at varying angles of attack ( alpha ). The aim of the invention is to improve the properties of such a pump. To this end, at least a part of the blades (1 or 2) of the rows of blades (3 or 4) that are mounted on the pressure side thickens towards the rim facing the pressure side.
IPC 1-7
IPC 8 full level
F04D 17/16 (2006.01); F04D 19/04 (2006.01); F04D 29/32 (2006.01); F04D 29/38 (2006.01)
CPC (source: EP KR US)
F04D 19/04 (2013.01 - KR); F04D 19/042 (2013.01 - EP US); F04D 29/324 (2013.01 - EP US); F04D 29/544 (2013.01 - EP US); F05D 2240/122 (2013.01 - EP US); F05D 2240/304 (2013.01 - EP US); F05D 2250/70 (2013.01 - EP US)
Designated contracting state (EPC)
AT BE CH CY DE FR GB IT LI
DOCDB simple family (publication)
WO 0225116 A1 20020328; DE 10046506 A1 20020328; EP 1319130 A1 20030618; JP 2004526090 A 20040826; KR 20030032046 A 20030423; US 2004091351 A1 20040513
DOCDB simple family (application)
EP 0109195 W 20010809; DE 10046506 A 20000920; EP 01967249 A 20010809; JP 2002528686 A 20010809; KR 20037004016 A 20030319; US 38091803 A 20030318