EP 1319131 A1 20030618 - COMPOUND FRICTION VACUUM PUMP
Title (en)
COMPOUND FRICTION VACUUM PUMP
Title (de)
COMPOUND-REIBUNGSVAKUUMPUMPE
Title (fr)
POMPE A VIDE A FRICTION COMPOSEE
Publication
Application
Priority
- DE 10046766 A 20000921
- EP 0109194 W 20010809
Abstract (en)
[origin: WO0227189A1] The invention relates to a friction vacuum pump (1) comprising at least one turbomolecular pump stage, with a molecular pump stage that is subsequently connected on the pressure side, and with a transition stage mounted between the turbomolecular pump stage and the molecular pump stage. In order to improve the transition from the turbomolecular zone to the molecular zone, the transition stage has a flow section that is continuously tapered in the tangential direction.
IPC 1-7
IPC 8 full level
F04D 17/04 (2006.01); F04D 19/04 (2006.01); F04D 29/54 (2006.01)
CPC (source: EP US)
F04D 19/042 (2013.01 - EP US); F04D 29/544 (2013.01 - EP US)
Designated contracting state (EPC)
CH DE FR GB IT LI
DOCDB simple family (publication)
WO 0227189 A1 20020404; DE 10046766 A1 20020411; DE 50114375 D1 20081113; EP 1319131 A1 20030618; EP 1319131 B1 20081001; JP 2004510100 A 20040402; US 2004033130 A1 20040219; US 6890146 B2 20050510
DOCDB simple family (application)
EP 0109194 W 20010809; DE 10046766 A 20000921; DE 50114375 T 20010809; EP 01974147 A 20010809; JP 2002530533 A 20010809; US 38098803 A 20030828